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TJ ET EMC /P <</MCID 12 >> BDC BT 1 0 0 -1 319.98400879 20.62100029 Tm [(Residue)] TJ ET EMC /P <</MCID 13 >> BDC BT 1 0 0 -1 367.43200684 20.62100029 Tm [( )] TJ ET EMC /P <</MCID 14 >> BDC BT 1 0 0 -1 370.93200684 20.62100029 Tm [(Removal)] TJ ET EMC /P <</MCID 15 >> BDC BT 1 0 0 -1 423.80801392 20.62100029 Tm [( )] TJ ET EMC /P <</MCID 16 >> BDC BT 1 0 0 -1 427.30801392 20.62100029 Tm [(Technology)] TJ ET EMC /P <</MCID 17 >> BDC BT 1 0 0 -1 496.53601074 20.62100029 Tm /GS1 gs 0 g [( )] TJ ET EMC q 1 0 0 1 0 31.20000076 cm /P <</MCID 18 >> BDC BT /FAAABB 8 Tf 1 0 0 -1 33.78099823 8.46700001 Tm /GS2 gs 0 g [<0003>] TJ ET EMC /P <</MCID 19 >> BDC BT /FAAABG 12 Tf 1 0 0 -1 38.61299896 12.10299969 Tm [(Ting)] TJ ET EMC /P <</MCID 20 >> BDC BT 1 0 0 -1 61.27700043 12.10299969 Tm [( )] TJ ET EMC /P <</MCID 21 >> BDC BT 1 0 0 -1 64.27700043 12.10299969 Tm [(Yao)] TJ ET EMC /P <</MCID 22 >> BDC BT 1 0 0 -1 84.26899719 12.10299969 Tm [( )] TJ ET EMC /P <</MCID 23 >> BDC BT /FAAABG 8 Tf 1 0 0 -1 87.26899719 8.46700001 Tm [(1)] TJ ET EMC /P <</MCID 24 >> BDC BT /FAAABG 12 Tf 1 0 0 -1 91.26899719 12.10299969 Tm [(,)] TJ ET EMC /P <</MCID 25 >> BDC BT 1 0 0 -1 94.26899719 12.10299969 Tm [( )] TJ ET EMC /P <</MCID 26 >> BDC BT 1 0 0 -1 97.26899719 12.10299969 Tm [(Yang)] TJ ET EMC /P <</MCID 27 >> BDC BT 1 0 0 -1 123.26100159 12.10299969 Tm [( )] TJ ET EMC /P <</MCID 28 >> BDC BT 1 0 0 -1 126.26100159 12.10299969 Tm [(Chen)] TJ ET EMC /P <</MCID 29 >> BDC BT 1 0 0 -1 151.59100342 12.10299969 Tm [( )] TJ ET EMC /P <</MCID 30 >> BDC BT /FAAABG 8 Tf 1 0 0 -1 154.59100342 8.46700001 Tm [(1)] TJ ET EMC /P <</MCID 31 >> BDC BT /FAAABG 12 Tf 1 0 0 -1 158.59100342 12.10299969 Tm [(,)] TJ ET EMC /P <</MCID 32 >> BDC BT 1 0 0 -1 161.59100342 12.10299969 Tm [( )] TJ ET EMC /P <</MCID 33 >> BDC BT 1 0 0 -1 164.59100342 12.10299969 Tm [(Wenjun)] TJ ET EMC /P <</MCID 34 >> BDC BT 1 0 0 -1 202.57699585 12.10299969 Tm [( )] TJ ET EMC /P <</MCID 35 >> BDC BT 1 0 0 -1 205.57699585 12.10299969 Tm [(Wang)] TJ ET EMC /P <</MCID 36 >> BDC BT 1 0 0 -1 234.22900391 12.10299969 Tm [( )] TJ ET EMC /P <</MCID 37 >> BDC BT /FAAABG 8 Tf 1 0 0 -1 237.22900391 8.46700001 Tm [(1)] TJ ET EMC /P <</MCID 38 >> BDC BT /FAAABG 12 Tf 1 0 0 -1 241.22900391 12.10299969 Tm [(,)] TJ ET EMC /P <</MCID 39 >> BDC BT 1 0 0 -1 244.22900391 12.10299969 Tm [( )] TJ ET EMC /P <</MCID 40 >> BDC BT 1 0 0 -1 247.22900391 12.10299969 Tm [(Xiaoyan)] TJ ET EMC /P <</MCID 41 >> BDC BT 1 0 0 -1 287.88101196 12.10299969 Tm [( )] TJ ET EMC /P <</MCID 42 >> BDC BT 1 0 0 -1 290.88101196 12.10299969 Tm [(Zhang)] TJ ET EMC /P <</MCID 43 >> BDC BT 1 0 0 -1 321.5369873 12.10299969 Tm [( )] TJ ET EMC /P <</MCID 44 >> BDC BT /FAAABG 8 Tf 1 0 0 -1 324.5369873 8.46700001 Tm [(1)] TJ ET EMC /P <</MCID 45 >> BDC BT /FAAABG 12 Tf 1 0 0 -1 328.5369873 12.10299969 Tm [(,)] TJ ET EMC /P <</MCID 46 >> BDC BT 1 0 0 -1 331.5369873 12.10299969 Tm [( )] TJ ET EMC /P <</MCID 47 >> BDC BT 1 0 0 -1 334.5369873 12.10299969 Tm [(Fuping)] TJ ET EMC /P <</MCID 48 >> BDC BT 1 0 0 -1 368.54501343 12.10299969 Tm [( )] TJ ET EMC /P <</MCID 49 >> BDC BT 1 0 0 -1 371.54501343 12.10299969 Tm [(Chen)] TJ ET EMC /P <</MCID 50 >> BDC BT 1 0 0 -1 396.875 12.10299969 Tm [( )] TJ ET EMC /P <</MCID 51 >> BDC BT /FAAABG 8 Tf 1 0 0 -1 399.875 8.46700001 Tm [(1)] TJ ET EMC /P <</MCID 52 >> BDC BT /FAAABG 12 Tf 1 0 0 -1 403.875 12.10299969 Tm [(,)] TJ ET EMC /P <</MCID 53 >> BDC BT 1 0 0 -1 406.875 12.10299969 Tm [( )] TJ ET EMC /P <</MCID 54 >> BDC BT 1 0 0 -1 409.875 12.10299969 Tm [(David)] TJ ET EMC /P <</MCID 55 >> BDC BT 1 0 0 -1 439.20098877 12.10299969 Tm [( )] TJ ET EMC /P <</MCID 56 >> BDC BT 1 0 0 -1 442.20098877 12.10299969 Tm [(H.)] TJ ET EMC /P <</MCID 57 >> BDC BT 1 0 0 -1 453.86700439 12.10299969 Tm [( )] TJ ET EMC /P <</MCID 58 >> BDC BT 1 0 0 -1 456.86700439 12.10299969 Tm [(Wang)] TJ ET EMC /P <</MCID 59 >> BDC BT /FAAABG 8 Tf 1 0 0 -1 485.51901245 8.46700001 Tm [(1)] TJ ET EMC /P <</MCID 60 >> BDC BT /FAAABG 12 Tf 1 0 0 -1 489.51901245 12.10299969 Tm /GS3 gs 0 g [( )] TJ ET EMC Q q 1 0 0 1 0 46.79999924 cm /P <</MCID 61 >> BDC BT /FAAABG 12 Tf 1 0 0 -1 127.33100128 12.10299969 Tm /GS4 gs 0 g [(Dongqiang)] TJ ET EMC /P <</MCID 62 >> BDC BT 1 0 0 -1 180.65699768 12.10299969 Tm [( )] TJ ET EMC /P <</MCID 63 >> BDC BT 1 0 0 -1 183.65699768 12.10299969 Tm [(Chen)] TJ ET EMC /P <</MCID 64 >> BDC BT /FAAABG 8 Tf 1 0 0 -1 208.98699951 8.46700001 Tm [(2)] TJ ET EMC /P <</MCID 65 >> BDC BT /FAAABG 12 Tf 1 0 0 -1 212.98699951 12.10299969 Tm [(,)] TJ ET EMC /P <</MCID 66 >> BDC BT 1 0 0 -1 215.98699951 12.10299969 Tm [( )] TJ ET EMC /P <</MCID 67 >> BDC BT 1 0 0 -1 218.98699951 12.10299969 Tm [(Sunny)] TJ ET EMC /P <</MCID 68 >> BDC BT 1 0 0 -1 249.66099548 12.10299969 Tm [( )] TJ ET EMC /P <</MCID 69 >> BDC BT 1 0 0 -1 252.66099548 12.10299969 Tm [(He)] TJ ET EMC /P <</MCID 70 >> BDC BT /FAAABG 8 Tf 1 0 0 -1 266.65301514 8.46700001 Tm [(2)] TJ ET EMC /P <</MCID 71 >> BDC BT /FAAABG 12 Tf 1 0 0 -1 270.65301514 12.10299969 Tm [(,)] TJ ET EMC /P <</MCID 72 >> BDC BT 1 0 0 -1 273.65301514 12.10299969 Tm [( )] TJ ET EMC /P <</MCID 73 >> BDC BT 1 0 0 -1 276.65301514 12.10299969 Tm [(Rock)] TJ ET EMC /P <</MCID 74 >> BDC BT 1 0 0 -1 301.98300171 12.10299969 Tm [( )] TJ ET EMC /P <</MCID 75 >> BDC BT 1 0 0 -1 304.98300171 12.10299969 Tm [(Xu)] TJ ET EMC /P <</MCID 76 >> BDC BT /FAAABG 8 Tf 1 0 0 -1 319.64898682 8.46700001 Tm [(2)] TJ ET EMC /P <</MCID 77 >> BDC BT /FAAABG 12 Tf 1 0 0 -1 323.64898682 12.10299969 Tm [(,)] TJ ET EMC /P <</MCID 78 >> BDC BT 1 0 0 -1 326.64898682 12.10299969 Tm [( )] TJ ET EMC /P <</MCID 79 >> BDC BT 1 0 0 -1 329.64898682 12.10299969 Tm [(Libbert)] TJ ET EMC /P <</MCID 80 >> BDC BT 1 0 0 -1 364.96899414 12.10299969 Tm [( )] TJ ET EMC /P <</MCID 81 >> BDC BT 1 0 0 -1 367.96899414 12.10299969 Tm [(Peng)] TJ ET EMC /P <</MCID 82 >> BDC BT /FAAABG 8 Tf 1 0 0 -1 391.96899414 8.46700001 Tm [(2)] TJ ET EMC /P <</MCID 83 >> BDC BT /FAAACB 12 Tf 1 0 0 -1 395.96899414 12.10299969 Tm /GS5 gs 0 g [( )] TJ ET EMC Q q 1 0 0 1 0 62.40000153 cm /P <</MCID 84 >> BDC BT /FAAACB 12 Tf 1 0 0 -1 261.6499939 11.90100002 Tm [( )] TJ ET EMC Q q 1 0 0 1 0 78 cm /P <</MCID 85 >> BDC BT /FAAABG 6.5 Tf 1 0 0 -1 141.59199524 8.35599995 Tm /GS6 gs 0 g [(1)] TJ ET EMC /P <</MCID 86 >> BDC BT 1 0 0 -1 144.84199524 8.35599995 Tm [( )] TJ ET EMC /P <</MCID 87 >> BDC BT /FAAABG 10 Tf 1 0 0 -1 146.46699524 11.38599968 Tm [(welcome银河国际网站)] TJ ET EMC /P <</MCID 88 >> BDC BT 1 0 0 -1 169.25 11.38599968 Tm [( )] TJ ET EMC /P <</MCID 89 >> BDC BT 1 0 0 -1 171.75 11.38599968 Tm [(Research)] TJ ET EMC /P <</MCID 90 >> BDC BT 1 0 0 -1 208.39599609 11.38599968 Tm [( )] TJ ET EMC /P <</MCID 91 >> BDC BT 1 0 0 -1 210.89599609 11.38599968 Tm [(\(Shanghai\),)] TJ ET EMC /P <</MCID 92 >> BDC BT 1 0 0 -1 257.27301025 11.38599968 Tm [( )] TJ ET EMC /P <</MCID 93 >> BDC BT 1 0 0 -1 259.77301025 11.38599968 Tm [(Inc.,)] TJ ET EMC /P <</MCID 94 >> BDC BT 1 0 0 -1 277.54199219 11.38599968 Tm [( )] TJ ET EMC /P <</MCID 95 >> BDC BT 1 0 0 -1 280.04199219 11.38599968 Tm [(Pudong,)] TJ ET EMC /P <</MCID 96 >> BDC BT 1 0 0 -1 313.10400391 11.38599968 Tm [( )] TJ ET EMC /P <</MCID 97 >> BDC BT 1 0 0 -1 315.60400391 11.38599968 Tm [(Shanghai,)] TJ ET EMC /P <</MCID 98 >> BDC BT 1 0 0 -1 355.3210144 11.38599968 Tm [( )] TJ ET EMC /P <</MCID 99 >> BDC BT 1 0 0 -1 357.8210144 11.38599968 Tm [(China)] TJ ET EMC /P <</MCID 100 >> BDC BT /FAAACG 11 Tf 1 0 0 -1 381.70800781 11.38599968 Tm /GS7 gs 0 g [( )] TJ ET EMC Q q 1 0 0 1 0 93.59999847 cm /P <</MCID 101 >> BDC BT /FAAABG 6.5 Tf 1 0 0 -1 120.89900208 8.35599995 Tm /GS8 gs 0 g [(2)] TJ ET EMC /P <</MCID 102 >> BDC BT 1 0 0 -1 124.14900208 8.35599995 Tm [( )] TJ ET EMC /P <</MCID 103 >> BDC BT /FAAABG 10 Tf 1 0 0 -1 125.77400208 11.38599968 Tm [(Anji)] TJ ET EMC /P <</MCID 104 >> BDC BT 1 0 0 -1 143.55200195 11.38599968 Tm [( )] TJ ET EMC /P <</MCID 105 >> BDC BT 1 0 0 -1 146.05200195 11.38599968 Tm [(Microele)1(ctronics)] TJ ET EMC /P <</MCID 106 >> BDC BT 1 0 0 -1 213.80099487 11.38599968 Tm [( )] TJ ET EMC /P <</MCID 107 >> BDC BT 1 0 0 -1 216.30099487 11.38599968 Tm [(\(Shanghai\))] TJ ET EMC /P <</MCID 108 >> BDC BT 1 0 0 -1 260.17800903 11.38599968 Tm [( )] TJ ET EMC /P <</MCID 109 >> BDC BT 1 0 0 -1 262.67800903 11.38599968 Tm [(Co.,Ltd.,)] TJ ET EMC /P <</MCID 110 >> BDC BT 1 0 0 -1 298.23498535 11.38599968 Tm [( )] TJ ET EMC /P <</MCID 111 >> BDC BT 1 0 0 -1 300.73498535 11.38599968 Tm [(Pudong,)] TJ ET EMC /P <</MCID 112 >> BDC BT 1 0 0 -1 333.79699707 11.38599968 Tm [( )] TJ ET EMC /P <</MCID 113 >> BDC BT 1 0 0 -1 336.29699707 11.38599968 Tm [(Shanghai,)] TJ ET EMC /P <</MCID 114 >> BDC BT 1 0 0 -1 376.01400757 11.38599968 Tm [( )] TJ ET EMC /P <</MCID 115 >> BDC BT 1 0 0 -1 378.51400757 11.38599968 Tm [(China)] TJ ET EMC /P <</MCID 116 >> BDC BT /FAAACG 11 Tf 1 0 0 -1 402.40100098 11.38599968 Tm /GS9 gs 0 g [( )] TJ ET EMC Q q 1 0 0 1 0 109.19999695 cm /P <</MCID 117 >> BDC BT /FAAABG 10 Tf 1 0 0 -1 129.42599487 11.38599968 Tm /GS10 gs 0 g [(E-mai)1(l:)] TJ ET EMC /P <</MCID 118 >> BDC BT 1 0 0 -1 159.41600037 11.38599968 Tm [( )] TJ ET EMC /P <</MCID 119 >> BDC BT 1 0 0 -1 161.91600037 11.38599968 Tm 0 0 1 rg [(hedy.yao@a)1(cmrcsh.com)] TJ ET EMC /P <</MCID 120 >> BDC BT 1 0 0 -1 260.53399658 11.38599968 Tm [(,)] TJ ET EMC /P <</MCID 121 >> BDC BT 1 0 0 -1 263.03399658 11.38599968 Tm [( )] TJ ET EMC /P <</MCID 122 >> BDC BT 1 0 0 -1 265.53399658 11.38599968 Tm [(dongqiangche)1(n@anjimi)1(cro.com)] TJ ET EMC /P <</MCID 123 >> BDC BT 1 0 0 -1 393.87399292 11.38599968 Tm /GS11 gs 0 g [( )] TJ ET EMC /P <</MCID 124 >> BDC q /GS12 gs 0 0 1 RG 0.5 w 161.91600037 12.76099968 m 393.87399292 12.76099968 l S Q EMC Q q 1 0 0 1 0 124.80000305 cm /P <</MCID 125 >> BDC BT /FAAADG 10 Tf 1 0 0 -1 0 11.21700001 Tm [( )] TJ ET EMC Q q 1 0 0 1 5.97700024 124.80000305 cm Q Q q 1 0 0 1 56.70000076 176.3999939 cm /P <</MCID 126 >> BDC BT /FAAAAH 11 Tf 1 0 0 -1 94.69599915 11.74499989 Tm 0 g [(Abstract)] TJ ET EMC /P <</MCID 127 >> BDC BT 1 0 0 -1 135.6289978 11.74499989 Tm /GS13 gs 0 g [( )] TJ ET EMC q 1 0 0 1 0 15.60000038 cm /P <</MCID 128 >> BDC BT /FAAABG 10 Tf 1 0 0 -1 0 11.38599968 Tm /GS14 gs 0 g [(Among)] TJ ET EMC /P <</MCID 129 >> BDC BT 1 0 0 -1 30 11.38599968 Tm [( )] TJ ET EMC /P <</MCID 130 >> BDC BT 1 0 0 -1 32.5 11.38599968 Tm [(the)] TJ ET EMC /P <</MCID 131 >> BDC BT 1 0 0 -1 44.71699905 11.38599968 Tm [( )] TJ ET EMC /P <</MCID 132 >> BDC BT 1 0 0 -1 47.21699905 11.38599968 Tm [(techni)1(cal)] TJ ET EMC /P <</MCID 133 >> BDC BT 1 0 0 -1 83.30599976 11.38599968 Tm [( )] TJ ET EMC /P <</MCID 134 >> BDC BT 1 0 0 -1 85.80599976 11.38599968 Tm [(nodes)] TJ ET EMC /P <</MCID 135 >> BDC BT 1 0 0 -1 109.13600159 11.38599968 Tm [( )] TJ ET EMC /P <</MCID 136 >> BDC BT 1 0 0 -1 111.63600159 11.38599968 Tm [(at)] TJ ET EMC /P <</MCID 137 >> BDC BT 1 0 0 -1 118.85299683 11.38599968 Tm [( )] TJ ET EMC /P <</MCID 138 >> BDC BT 1 0 0 -1 121.35299683 11.38599968 Tm [(90nm)] TJ ET EMC /P <</MCID 139 >> BDC BT 1 0 0 -1 144.1309967 11.38599968 Tm [( )] TJ ET EMC /P <</MCID 140 >> BDC BT 1 0 0 -1 146.6309967 11.38599968 Tm [(and)] TJ ET EMC /P <</MCID 141 >> BDC BT 1 0 0 -1 161.06900024 11.38599968 Tm [( )] TJ ET EMC /P <</MCID 142 >> BDC BT 1 0 0 -1 163.56900024 11.38599968 Tm [(below,)] TJ ET EMC /P <</MCID 143 >> BDC BT 1 0 0 -1 190.50700378 11.38599968 Tm [( )] TJ ET EMC /P <</MCID 144 >> BDC BT 1 0 0 -1 0 26.98600006 Tm [(copper/l)1(ow)-1(-k)] TJ ET EMC /P <</MCID 145 >> BDC BT 1 0 0 -1 53.31499863 26.98600006 Tm [( )] TJ ET EMC /P <</MCID 146 >> BDC BT 1 0 0 -1 55.81499863 26.98600006 Tm [(interc)1(onnect)] TJ ET EMC /P <</MCID 147 >> BDC BT 1 0 0 -1 105.23400116 26.98600006 Tm [( )] TJ ET EMC /P <</MCID 148 >> BDC BT 1 0 0 -1 107.73400116 26.98600006 Tm [(possesses)] TJ ET EMC /P <</MCID 149 >> BDC BT 1 0 0 -1 146.06900024 26.98600006 Tm [( )] TJ ET EMC /P <</MCID 150 >> BDC BT 1 0 0 -1 148.56900024 26.98600006 Tm [(the)] TJ ET EMC /P <</MCID 151 >> BDC BT 1 0 0 -1 160.78599548 26.98600006 Tm [( )] TJ ET EMC /P <</MCID 152 >> BDC BT 1 0 0 -1 163.28599548 26.98600006 Tm [(charac)1(teristics)] TJ ET EMC /P <</MCID 153 >> BDC BT 1 0 0 -1 220.47399902 26.98600006 Tm [( )] TJ ET EMC /P <</MCID 154 >> BDC BT 1 0 0 -1 0 42.58599854 Tm [(of)] TJ ET EMC /P <</MCID 155 >> BDC BT 1 0 0 -1 8.32999992 42.58599854 Tm [( )] TJ ET EMC /P <</MCID 156 >> BDC BT 1 0 0 -1 10.82999992 42.58599854 Tm [(falli)1(ng)] TJ ET EMC /P <</MCID 157 >> BDC BT 1 0 0 -1 36.93399811 42.58599854 Tm [( )] TJ ET EMC /P <</MCID 158 >> BDC BT 1 0 0 -1 39.43399811 42.58599854 Tm [(resistive-c)1(apaciti)1(ve)] TJ ET EMC /P <</MCID 159 >> BDC BT 1 0 0 -1 116.61699677 42.58599854 Tm [( )] TJ ET EMC /P <</MCID 160 >> BDC BT 1 0 0 -1 119.11699677 42.58599854 Tm [(\(RC\))] TJ ET EMC /P <</MCID 161 >> BDC BT 1 0 0 -1 139.11700439 42.58599854 Tm [( )] TJ ET EMC /P <</MCID 162 >> BDC BT 1 0 0 -1 141.61700439 42.58599854 Tm [(delay,)] TJ ET EMC /P <</MCID 163 >> BDC BT 1 0 0 -1 165.77200317 42.58599854 Tm [( )] TJ ET EMC /P <</MCID 164 >> BDC BT 1 0 0 -1 168.27200317 42.58599854 Tm [(low)] TJ ET EMC /P <</MCID 165 >> BDC BT 1 0 0 -1 183.27200317 42.58599854 Tm [( )] TJ ET EMC /P <</MCID 166 >> BDC BT 1 0 0 -1 0 58.18599701 Tm [(interc)1(onnect)] TJ ET EMC /P <</MCID 167 >> BDC BT 1 0 0 -1 49.41899872 58.18599701 Tm [( )] TJ ET EMC /P <</MCID 168 >> BDC BT 1 0 0 -1 51.91899872 58.18599701 Tm [(resistance)] TJ ET EMC /P <</MCID 169 >> BDC BT 1 0 0 -1 91.34300232 58.18599701 Tm [( )] TJ ET EMC /P <</MCID 170 >> BDC BT 1 0 0 -1 93.84300232 58.18599701 Tm [(and)] TJ ET EMC /P <</MCID 171 >> BDC BT 1 0 0 -1 108.28099823 58.18599701 Tm [( )] TJ ET EMC /P <</MCID 172 >> BDC BT 1 0 0 -1 110.78099823 58.18599701 Tm [(high)] TJ ET EMC /P <</MCID 173 >> BDC BT 1 0 0 -1 128.55900574 58.18599701 Tm [( )] TJ ET EMC /P <</MCID 174 >> BDC BT 1 0 0 -1 131.05900574 58.18599701 Tm [(relia)1(bility,)] TJ ET EMC /P <</MCID 175 >> BDC BT 1 0 0 -1 172.43600464 58.18599701 Tm [( )] TJ ET EMC /P <</MCID 176 >> BDC BT 1 0 0 -1 174.93600464 58.18599701 Tm [(which)] TJ ET EMC /P <</MCID 177 >> BDC BT 1 0 0 -1 199.37399292 58.18599701 Tm [( )] TJ ET EMC /P <</MCID 178 >> BDC BT 1 0 0 -1 201.87399292 58.18599701 Tm [(is)] TJ ET EMC /P <</MCID 179 >> BDC BT 1 0 0 -1 208.54400635 58.18599701 Tm [( )] TJ ET EMC /P <</MCID 180 >> BDC BT 1 0 0 -1 0 73.78600311 Tm [(commonl)1(y)] TJ ET EMC /P <</MCID 181 >> BDC BT 1 0 0 -1 42.77299881 73.78600311 Tm [( )] TJ ET EMC /P <</MCID 182 >> BDC BT 1 0 0 -1 45.27299881 73.78600311 Tm [(used)] TJ ET EMC /P <</MCID 183 >> BDC BT 1 0 0 -1 63.60300064 73.78600311 Tm [( )] TJ ET EMC /P <</MCID 184 >> BDC BT 1 0 0 -1 66.10299683 73.78600311 Tm [(to)] TJ ET EMC /P <</MCID 185 >> BDC BT 1 0 0 -1 73.8809967 73.78600311 Tm [( )] TJ ET EMC /P <</MCID 186 >> BDC BT 1 0 0 -1 76.3809967 73.78600311 Tm [(replac)1(e)] TJ ET EMC /P <</MCID 187 >> BDC BT 1 0 0 -1 105.24299622 73.78600311 Tm [( )] TJ ET EMC /P <</MCID 188 >> BDC BT 1 0 0 -1 107.74299622 73.78600311 Tm [(tradit)1(ional)] TJ ET EMC /P <</MCID 189 >> BDC BT 1 0 0 -1 148.84199524 73.78600311 Tm [( )] TJ ET EMC /P <</MCID 190 >> BDC BT 1 0 0 -1 151.34199524 73.78600311 Tm [(alumi)1(num/silicon)] TJ ET EMC /P <</MCID 191 >> BDC BT 1 0 0 -1 221.33700562 73.78600311 Tm [( )] TJ ET EMC /P <</MCID 192 >> BDC BT 1 0 0 -1 0 89.38600159 Tm [(dioxide)] TJ ET EMC /P <</MCID 193 >> BDC BT 1 0 0 -1 29.99500084 89.38600159 Tm [( )] TJ ET EMC /P <</MCID 194 >> BDC BT 1 0 0 -1 32.49499893 89.38600159 Tm [(in)] TJ ET EMC /P <</MCID 195 >> BDC BT 1 0 0 -1 40.27299881 89.38600159 Tm [( )] TJ ET EMC /P <</MCID 196 >> BDC BT 1 0 0 -1 42.77299881 89.38600159 Tm [(interc)1(onnection)] TJ ET EMC /P <</MCID 197 >> BDC BT 1 0 0 -1 104.97000122 89.38600159 Tm [( )] TJ ET EMC /P <</MCID 198 >> BDC BT 1 0 0 -1 107.47000122 89.38600159 Tm [(technol)1(ogy.)] TJ ET EMC /P <</MCID 199 >> BDC BT 1 0 0 -1 154.40400696 89.38600159 Tm [( )] TJ ET EMC /P <</MCID 200 >> BDC BT 1 0 0 -1 156.90400696 89.38600159 Tm [(Since)] TJ ET EMC /P <</MCID 201 >> BDC BT 1 0 0 -1 179.1210022 89.38600159 Tm [( )] TJ ET EMC /P <</MCID 202 >> BDC BT 1 0 0 -1 181.6210022 89.38600159 Tm [(copper)] TJ ET EMC /P <</MCID 203 >> BDC BT 1 0 0 -1 208.82800293 89.38600159 Tm [( )] TJ ET EMC /P <</MCID 204 >> BDC BT 1 0 0 -1 0 104.98600006 Tm [(cannot)] TJ ET EMC /P <</MCID 205 >> BDC BT 1 0 0 -1 26.65500069 104.98600006 Tm [( )] TJ ET EMC /P <</MCID 206 >> BDC BT 1 0 0 -1 29.15500069 104.98600006 Tm [(react)] TJ ET EMC /P <</MCID 207 >> BDC BT 1 0 0 -1 48.57899857 104.98600006 Tm [( )] TJ ET EMC /P <</MCID 208 >> BDC BT 1 0 0 -1 51.07899857 104.98600006 Tm [(with)] TJ ET EMC /P <</MCID 209 >> BDC BT 1 0 0 -1 68.85700226 104.98600006 Tm [( )] TJ ET EMC /P <</MCID 210 >> BDC BT 1 0 0 -1 71.35700226 104.98600006 Tm [(the)] TJ ET EMC /P <</MCID 211 >> BDC BT 1 0 0 -1 83.5739975 104.98600006 Tm [( )] TJ ET EMC /P <</MCID 212 >> BDC BT 1 0 0 -1 86.0739975 104.98600006 Tm [(etch)] TJ ET EMC /P <</MCID 213 >> BDC BT 1 0 0 -1 102.72899628 104.98600006 Tm [( )] TJ ET EMC /P <</MCID 214 >> BDC BT 1 0 0 -1 105.22899628 104.98600006 Tm [(gas)] TJ ET EMC /P <</MCID 215 >> BDC BT 1 0 0 -1 118.55899811 104.98600006 Tm [( )] TJ ET EMC /P <</MCID 216 >> BDC BT 1 0 0 -1 121.05899811 104.98600006 Tm [(to)] TJ ET EMC /P <</MCID 217 >> BDC BT 1 0 0 -1 128.83700562 104.98600006 Tm [( )] TJ ET EMC /P <</MCID 218 >> BDC BT 1 0 0 -1 131.33700562 104.98600006 Tm [(form)] TJ ET EMC /P <</MCID 219 >> BDC BT 1 0 0 -1 150.7749939 104.98600006 Tm [( )] TJ ET EMC /P <</MCID 220 >> BDC BT 1 0 0 -1 153.2749939 104.98600006 Tm [(volati)1(le)] TJ ET EMC /P <</MCID 221 >> BDC BT 1 0 0 -1 183.26499939 104.98600006 Tm [( )] TJ ET EMC /P <</MCID 222 >> BDC BT 1 0 0 -1 185.76499939 104.98600006 Tm [(by-)] TJ ET EMC /P <</MCID 223 >> BDC BT 1 0 0 -1 0 120.58599854 Tm [(products,)] TJ ET EMC /P <</MCID 224 >> BDC BT 1 0 0 -1 36.93799973 120.58599854 Tm [( )] TJ ET EMC /P <</MCID 225 >> BDC BT 1 0 0 -1 39.43799973 120.58599854 Tm [(copper)] TJ ET EMC /P <</MCID 226 >> BDC BT 1 0 0 -1 66.64499664 120.58599854 Tm [( )] TJ ET EMC /P <</MCID 227 >> BDC BT 1 0 0 -1 69.14499664 120.58599854 Tm [(meta)1(llizat)1(ion)] TJ ET EMC /P <</MCID 228 >> BDC BT 1 0 0 -1 121.34700012 120.58599854 Tm [( )] TJ ET EMC /P <</MCID 229 >> BDC BT 1 0 0 -1 123.84700012 120.58599854 Tm [(is)] TJ ET EMC /P <</MCID 230 >> BDC BT 1 0 0 -1 130.51699829 120.58599854 Tm [( )] TJ ET EMC /P <</MCID 231 >> BDC BT 1 0 0 -1 133.01699829 120.58599854 Tm [(unsuitable)] TJ ET EMC /P <</MCID 232 >> BDC BT 1 0 0 -1 174.1210022 120.58599854 Tm [( )] TJ ET EMC /P <</MCID 233 >> BDC BT 1 0 0 -1 176.6210022 120.58599854 Tm [(for)] TJ ET EMC /P <</MCID 234 >> BDC BT 1 0 0 -1 188.28100586 120.58599854 Tm [( )] TJ ET EMC /P <</MCID 235 >> BDC BT 1 0 0 -1 190.78100586 120.58599854 Tm [(the)] TJ ET EMC /P <</MCID 236 >> BDC BT 1 0 0 -1 202.9980011 120.58599854 Tm [( )] TJ ET EMC /P <</MCID 237 >> BDC BT 1 0 0 -1 0 136.18600464 Tm [(process)] TJ ET EMC /P <</MCID 238 >> BDC BT 1 0 0 -1 29.98999977 136.18600464 Tm [( )] TJ ET EMC /P <</MCID 239 >> BDC BT 1 0 0 -1 32.49000168 136.18600464 Tm [(of)] TJ ET EMC /P <</MCID 240 >> BDC BT 1 0 0 -1 40.81999969 136.18600464 Tm [( )] TJ ET EMC /P <</MCID 241 >> BDC BT 1 0 0 -1 43.31999969 136.18600464 Tm [(dry)] TJ ET EMC /P <</MCID 242 >> BDC BT 1 0 0 -1 56.65000153 136.18600464 Tm [( )] TJ ET EMC /P <</MCID 243 >> BDC BT 1 0 0 -1 59.15000153 136.18600464 Tm [(etchi)1(ng,)] TJ ET EMC /P <</MCID 244 >> BDC BT 1 0 0 -1 91.08399963 136.18600464 Tm [( )] TJ ET EMC /P <</MCID 245 >> BDC BT 1 0 0 -1 93.58399963 136.18600464 Tm [(and)] TJ ET EMC /P <</MCID 246 >> BDC BT 1 0 0 -1 108.02200317 136.18600464 Tm [( )] TJ ET EMC /P <</MCID 247 >> BDC BT 1 0 0 -1 110.52200317 136.18600464 Tm [(dual)] TJ ET EMC /P <</MCID 248 >> BDC BT 1 0 0 -1 127.73899841 136.18600464 Tm [( )] TJ ET EMC /P <</MCID 249 >> BDC BT 1 0 0 -1 130.23899841 136.18600464 Tm [(damasce)1(ne)] TJ ET EMC /P <</MCID 250 >> BDC BT 1 0 0 -1 174.10099792 136.18600464 Tm [( )] TJ ET EMC /P <</MCID 251 >> BDC BT 1 0 0 -1 176.60099792 136.18600464 Tm [(integra)1(tion)] TJ ET EMC /P <</MCID 252 >> BDC BT 1 0 0 -1 219.92100525 136.18600464 Tm [( )] TJ ET EMC /P <</MCID 253 >> BDC BT 1 0 0 -1 0 151.78599548 Tm [(scheme)] TJ ET EMC /P <</MCID 254 >> BDC BT 1 0 0 -1 29.98500061 151.78599548 Tm [( )] TJ ET EMC /P <</MCID 255 >> BDC BT 1 0 0 -1 32.48500061 151.78599548 Tm [(is)] TJ ET EMC /P <</MCID 256 >> BDC BT 1 0 0 -1 39.15499878 151.78599548 Tm [( )] TJ ET EMC /P <</MCID 257 >> BDC BT 1 0 0 -1 41.65499878 151.78599548 Tm [(used)] TJ ET EMC /P <</MCID 258 >> BDC BT 1 0 0 -1 59.98500061 151.78599548 Tm [( )] TJ ET EMC /P <</MCID 259 >> BDC BT 1 0 0 -1 62.48500061 151.78599548 Tm [(for)] TJ ET EMC /P <</MCID 260 >> BDC BT 1 0 0 -1 74.14499664 151.78599548 Tm [( )] TJ ET EMC /P <</MCID 261 >> BDC BT 1 0 0 -1 76.64499664 151.78599548 Tm [(BEOL)] TJ ET EMC /P <</MCID 262 >> BDC BT 1 0 0 -1 102.75299835 151.78599548 Tm [( )] TJ ET EMC /P <</MCID 263 >> BDC BT 1 0 0 -1 105.25299835 151.78599548 Tm [(interc)1(onnection.)] TJ ET EMC /P <</MCID 264 >> BDC BT 1 0 0 -1 169.94999695 151.78599548 Tm [( )] TJ ET EMC /P <</MCID 265 >> BDC BT 1 0 0 -1 172.44999695 151.78599548 Tm [(The)] TJ ET EMC /P <</MCID 266 >> BDC BT 1 0 0 -1 187.99699402 151.78599548 Tm [( )] TJ ET EMC /P <</MCID 267 >> BDC BT 1 0 0 -1 190.49699402 151.78599548 Tm [(wet)] TJ ET EMC /P <</MCID 268 >> BDC BT 1 0 0 -1 204.93499756 151.78599548 Tm [( )] TJ ET EMC /P <</MCID 269 >> BDC BT 1 0 0 -1 0 167.38600159 Tm [(chemi)1(s)-1(t)1(ry)] TJ ET EMC /P <</MCID 270 >> BDC BT 1 0 0 -1 39.43399811 167.38600159 Tm [( )] TJ ET EMC /P <</MCID 271 >> BDC BT 1 0 0 -1 41.93399811 167.38600159 Tm [(post-etch)] TJ ET EMC /P <</MCID 272 >> BDC BT 1 0 0 -1 78.58899689 167.38600159 Tm [( )] TJ ET EMC /P <</MCID 273 >> BDC BT 1 0 0 -1 81.08899689 167.38600159 Tm [(clea)1(n)] TJ ET EMC /P <</MCID 274 >> BDC BT 1 0 0 -1 102.18299866 167.38600159 Tm [( )] TJ ET EMC /P <</MCID 275 >> BDC BT 1 0 0 -1 104.68299866 167.38600159 Tm [(is)] TJ ET EMC /P <</MCID 276 >> BDC BT 1 0 0 -1 111.35299683 167.38600159 Tm [( )] TJ ET EMC /P <</MCID 277 >> BDC BT 1 0 0 -1 113.85299683 167.38600159 Tm [(an)] TJ ET EMC /P <</MCID 278 >> BDC BT 1 0 0 -1 123.29100037 167.38600159 Tm [( )] TJ ET EMC /P <</MCID 279 >> BDC BT 1 0 0 -1 125.79100037 167.38600159 Tm [(essential)] TJ ET EMC /P <</MCID 280 >> BDC BT 1 0 0 -1 160.2250061 167.38600159 Tm [( )] TJ ET EMC /P <</MCID 281 >> BDC BT 1 0 0 -1 162.7250061 167.38600159 Tm [(step)] TJ ET EMC /P <</MCID 282 >> BDC BT 1 0 0 -1 178.83299255 167.38600159 Tm [( )] TJ ET EMC /P <</MCID 283 >> BDC BT 1 0 0 -1 181.33299255 167.38600159 Tm [(in)] TJ ET EMC /P <</MCID 284 >> BDC BT 1 0 0 -1 189.11099243 167.38600159 Tm [( )] TJ ET EMC /P <</MCID 285 >> BDC BT 1 0 0 -1 191.61099243 167.38600159 Tm [(dual)] TJ ET EMC /P <</MCID 286 >> BDC BT 1 0 0 -1 208.82800293 167.38600159 Tm [( )] TJ ET EMC /P <</MCID 287 >> BDC BT 1 0 0 -1 0 182.98600769 Tm [(damasce)1(ne)] TJ ET EMC /P <</MCID 288 >> BDC BT 1 0 0 -1 43.86199951 182.98600769 Tm [( )] TJ ET EMC /P <</MCID 289 >> BDC BT 1 0 0 -1 46.36199951 182.98600769 Tm [(technol)1(ogy,)] TJ ET EMC /P <</MCID 290 >> BDC BT 1 0 0 -1 93.29599762 182.98600769 Tm [( )] TJ ET EMC /P <</MCID 291 >> BDC BT 1 0 0 -1 95.79599762 182.98600769 Tm [(and)] TJ ET EMC /P <</MCID 292 >> BDC BT 1 0 0 -1 110.23400116 182.98600769 Tm [( )] TJ ET EMC /P <</MCID 293 >> BDC BT 1 0 0 -1 112.73400116 182.98600769 Tm [(it)] TJ ET EMC /P <</MCID 294 >> BDC BT 1 0 0 -1 118.29100037 182.98600769 Tm [( )] TJ ET EMC /P <</MCID 295 >> BDC BT 1 0 0 -1 120.79100037 182.98600769 Tm [(is)] TJ ET EMC /P <</MCID 296 >> BDC BT 1 0 0 -1 127.46099854 182.98600769 Tm [( )] TJ ET EMC /P <</MCID 297 >> BDC BT 1 0 0 -1 129.96099854 182.98600769 Tm [(primari)1(ly)] TJ ET EMC /P <</MCID 298 >> BDC BT 1 0 0 -1 167.17300415 182.98600769 Tm [( )] TJ ET EMC /P <</MCID 299 >> BDC BT 1 0 0 -1 169.67300415 182.98600769 Tm [(used)] TJ ET EMC /P <</MCID 300 >> BDC BT 1 0 0 -1 188.00300598 182.98600769 Tm [( )] TJ ET EMC /P <</MCID 301 >> BDC BT 1 0 0 -1 190.50300598 182.98600769 Tm [(to)] TJ ET EMC /P <</MCID 302 >> BDC BT 1 0 0 -1 198.28100586 182.98600769 Tm [( )] TJ ET EMC /P <</MCID 303 >> BDC BT 1 0 0 -1 0 198.58599854 Tm [(eradic)1(ate)] TJ ET EMC /P <</MCID 304 >> BDC BT 1 0 0 -1 36.07899857 198.58599854 Tm [( )] TJ ET EMC /P <</MCID 305 >> BDC BT 1 0 0 -1 38.57899857 198.58599854 Tm [(the)] TJ ET EMC /P <</MCID 306 >> BDC BT 1 0 0 -1 50.79600143 198.58599854 Tm [( )] TJ ET EMC /P <</MCID 307 >> BDC BT 1 0 0 -1 53.29600143 198.58599854 Tm [(post)] TJ ET EMC /P <</MCID 308 >> BDC BT 1 0 0 -1 69.96600342 198.58599854 Tm [( )] TJ ET EMC /P <</MCID 309 >> BDC BT 1 0 0 -1 72.46600342 198.58599854 Tm [(etch)] TJ ET EMC /P <</MCID 310 >> BDC BT 1 0 0 -1 89.1210022 198.58599854 Tm [( )] TJ ET EMC /P <</MCID 311 >> BDC BT 1 0 0 -1 91.6210022 198.58599854 Tm [(residue.)] TJ ET EMC /P <</MCID 312 >> BDC BT 1 0 0 -1 122.9980011 198.58599854 Tm [( )] TJ ET EMC /P <</MCID 313 >> BDC BT 1 0 0 -1 125.4980011 198.58599854 Tm [(Throughout)] TJ ET EMC /P <</MCID 314 >> BDC BT 1 0 0 -1 172.71499634 198.58599854 Tm [( )] TJ ET EMC /P <</MCID 315 >> BDC BT 1 0 0 -1 175.21499634 198.58599854 Tm [(the)] TJ ET EMC /P <</MCID 316 >> BDC BT 1 0 0 -1 187.43200684 198.58599854 Tm [( )] TJ ET EMC /P <</MCID 317 >> BDC BT 1 0 0 -1 189.93200684 198.58599854 Tm [(clea)1(ning)] TJ ET EMC /P <</MCID 318 >> BDC BT 1 0 0 -1 223.80400085 198.58599854 Tm [( )] TJ ET EMC /P <</MCID 319 >> BDC BT 1 0 0 -1 0 214.18600464 Tm [(process,)] TJ ET EMC /P <</MCID 320 >> BDC BT 1 0 0 -1 32.49000168 214.18600464 Tm [( )] TJ ET EMC /P <</MCID 321 >> BDC BT 1 0 0 -1 34.99000168 214.18600464 Tm [(low-k,)] TJ ET EMC /P <</MCID 322 >> BDC BT 1 0 0 -1 60.81999969 214.18600464 Tm [( )] TJ ET EMC /P <</MCID 323 >> BDC BT 1 0 0 -1 63.31999969 214.18600464 Tm [(Cu,)] TJ ET EMC /P <</MCID 324 >> BDC BT 1 0 0 -1 77.48999786 214.18600464 Tm [( )] TJ ET EMC /P <</MCID 325 >> BDC BT 1 0 0 -1 79.98999786 214.18600464 Tm [(Ta/T)1(aN)] TJ ET EMC /P <</MCID 326 >> BDC BT 1 0 0 -1 111.08399963 214.18600464 Tm [( )] TJ ET EMC /P <</MCID 327 >> BDC BT 1 0 0 -1 113.58399963 214.18600464 Tm [(and)] TJ ET EMC /P <</MCID 328 >> BDC BT 1 0 0 -1 128.02200317 214.18600464 Tm [( )] TJ ET EMC /P <</MCID 329 >> BDC BT 1 0 0 -1 130.52200317 214.18600464 Tm [(other)] TJ ET EMC /P <</MCID 330 >> BDC BT 1 0 0 -1 151.06900024 214.18600464 Tm [( )] TJ ET EMC /P <</MCID 331 >> BDC BT 1 0 0 -1 153.56900024 214.18600464 Tm [(films)] TJ ET EMC /P <</MCID 332 >> BDC BT 1 0 0 -1 174.12600708 214.18600464 Tm [( )] TJ ET EMC /P <</MCID 333 >> BDC BT 1 0 0 -1 176.62600708 214.18600464 Tm [(in)] TJ ET EMC /P <</MCID 334 >> BDC BT 1 0 0 -1 184.40400696 214.18600464 Tm [( )] TJ ET EMC /P <</MCID 335 >> BDC BT 1 0 0 -1 0 229.78599548 Tm [(damasce)1(ne)] TJ ET EMC /P <</MCID 336 >> BDC BT 1 0 0 -1 43.86199951 229.78599548 Tm [( )] TJ ET EMC /P <</MCID 337 >> BDC BT 1 0 0 -1 46.36199951 229.78599548 Tm [(will)] TJ ET EMC /P <</MCID 338 >> BDC BT 1 0 0 -1 61.91899872 229.78599548 Tm [( )] TJ ET EMC /P <</MCID 339 >> BDC BT 1 0 0 -1 64.41899872 229.78599548 Tm [(be)] TJ ET EMC /P <</MCID 340 >> BDC BT 1 0 0 -1 73.85700226 229.78599548 Tm [( )] TJ ET EMC /P <</MCID 341 >> BDC BT 1 0 0 -1 76.35700226 229.78599548 Tm [(exposed.)] TJ ET EMC /P <</MCID 342 >> BDC BT 1 0 0 -1 111.62599945 229.78599548 Tm [( )] TJ ET EMC /P <</MCID 343 >> BDC BT 1 0 0 -1 114.12599945 229.78599548 Tm [(Consequently,)] TJ ET EMC /P <</MCID 344 >> BDC BT 1 0 0 -1 171.6210022 229.78599548 Tm [( )] TJ ET EMC /P <</MCID 345 >> BDC BT 1 0 0 -1 174.1210022 229.78599548 Tm [(the)] TJ ET EMC /P <</MCID 346 >> BDC BT 1 0 0 -1 186.33799744 229.78599548 Tm [( )] TJ ET EMC /P <</MCID 347 >> BDC BT 1 0 0 -1 188.83799744 229.78599548 Tm [(clea)1(ning)] TJ ET EMC /P <</MCID 348 >> BDC BT 1 0 0 -1 222.71000671 229.78599548 Tm [( )] TJ ET EMC /P <</MCID 349 >> BDC BT 1 0 0 -1 0 245.38600159 Tm [(solution)] TJ ET EMC /P <</MCID 350 >> BDC BT 1 0 0 -1 32.22700119 245.38600159 Tm [( )] TJ ET EMC /P <</MCID 351 >> BDC BT 1 0 0 -1 34.72700119 245.38600159 Tm [(must)] TJ ET EMC /P <</MCID 352 >> BDC BT 1 0 0 -1 54.17499924 245.38600159 Tm [( )] TJ ET EMC /P <</MCID 353 >> BDC BT 1 0 0 -1 56.67499924 245.38600159 Tm [(do)] TJ ET EMC /P <</MCID 354 >> BDC BT 1 0 0 -1 66.67500305 245.38600159 Tm [( )] TJ ET EMC /P <</MCID 355 >> BDC BT 1 0 0 -1 69.17500305 245.38600159 Tm [(less)] TJ ET EMC /P <</MCID 356 >> BDC BT 1 0 0 -1 84.17500305 245.38600159 Tm [( )] TJ ET EMC /P <</MCID 357 >> BDC BT 1 0 0 -1 86.67500305 245.38600159 Tm [(damage)] TJ ET EMC /P <</MCID 358 >> BDC BT 1 0 0 -1 117.76899719 245.38600159 Tm [( )] TJ ET EMC /P <</MCID 359 >> BDC BT 1 0 0 -1 120.26899719 245.38600159 Tm [(to)] TJ ET EMC /P <</MCID 360 >> BDC BT 1 0 0 -1 128.04699707 245.38600159 Tm [( )] TJ ET EMC /P <</MCID 361 >> BDC BT 1 0 0 -1 130.54699707 245.38600159 Tm [(numerous)] TJ ET EMC /P <</MCID 362 >> BDC BT 1 0 0 -1 169.98500061 245.38600159 Tm [( )] TJ ET EMC /P <</MCID 363 >> BDC BT 1 0 0 -1 172.48500061 245.38600159 Tm [(mate)1(rials.)] TJ ET EMC /P <</MCID 364 >> BDC BT 1 0 0 -1 211.63499451 245.38600159 Tm [( )] TJ ET EMC /P <</MCID 365 >> BDC BT 1 0 0 -1 214.13499451 245.38600159 Tm [(In)] TJ ET EMC /P <</MCID 366 >> BDC BT 1 0 0 -1 222.46499634 245.38600159 Tm [( )] TJ ET EMC /P <</MCID 367 >> BDC BT 1 0 0 -1 0 260.98599243 Tm [(this)] TJ ET EMC /P <</MCID 368 >> BDC BT 1 0 0 -1 14.44799995 260.98599243 Tm [( )] TJ ET EMC /P <</MCID 369 >> BDC BT 1 0 0 -1 16.94799995 260.98599243 Tm [(work,)] TJ ET EMC /P <</MCID 370 >> BDC BT 1 0 0 -1 40 260.98599243 Tm [( )] TJ ET EMC /P <</MCID 371 >> BDC BT 1 0 0 -1 42.5 260.98599243 Tm [(two)] TJ ET EMC /P <</MCID 372 >> BDC BT 1 0 0 -1 57.5 260.98599243 Tm [( )] TJ ET EMC /P <</MCID 373 >> BDC BT 1 0 0 -1 60 260.98599243 Tm [(types)] TJ ET EMC /P <</MCID 374 >> BDC BT 1 0 0 -1 81.10800171 260.98599243 Tm [( )] TJ ET EMC /P <</MCID 375 >> BDC BT 1 0 0 -1 83.60800171 260.98599243 Tm [(of)] TJ ET EMC /P <</MCID 376 >> BDC BT 1 0 0 -1 91.93800354 260.98599243 Tm [( )] TJ ET EMC /P <</MCID 377 >> BDC BT 1 0 0 -1 94.43800354 260.98599243 Tm [(semi-aque)1(ous)] TJ ET EMC /P <</MCID 378 >> BDC BT 1 0 0 -1 149.42300415 260.98599243 Tm [( )] TJ ET EMC /P <</MCID 379 >> BDC BT 1 0 0 -1 151.92300415 260.98599243 Tm [(wet)] TJ ET EMC /P <</MCID 380 >> BDC BT 1 0 0 -1 166.36099243 260.98599243 Tm [( )] TJ ET EMC /P <</MCID 381 >> BDC BT 1 0 0 -1 168.86099243 260.98599243 Tm [(clea)1(n)] TJ ET EMC /P <</MCID 382 >> BDC BT 1 0 0 -1 189.95500183 260.98599243 Tm [( )] TJ ET EMC /P <</MCID 383 >> BDC BT 1 0 0 -1 0 276.58599854 Tm [(chemi)1(cals)] TJ ET EMC /P <</MCID 384 >> BDC BT 1 0 0 -1 39.97999954 276.58599854 Tm [( )] TJ ET EMC /P <</MCID 385 >> BDC BT 1 0 0 -1 42.47999954 276.58599854 Tm [(\(ST250)] TJ ET EMC /P <</MCID 386 >> BDC BT 1 0 0 -1 72.48000336 276.58599854 Tm [( )] TJ ET EMC /P <</MCID 387 >> BDC BT 1 0 0 -1 74.98000336 276.58599854 Tm [(from)] TJ ET EMC /P <</MCID 388 >> BDC BT 1 0 0 -1 94.41799927 276.58599854 Tm [( )] TJ ET EMC /P <</MCID 389 >> BDC BT 1 0 0 -1 96.91799927 276.58599854 Tm [(ATMI)] TJ ET EMC /P <</MCID 390 >> BDC BT 1 0 0 -1 122.47000122 276.58599854 Tm [( )] TJ ET EMC /P <</MCID 391 >> BDC BT 1 0 0 -1 124.97000122 276.58599854 Tm [(and)] TJ ET EMC /P <</MCID 392 >> BDC BT 1 0 0 -1 139.40800476 276.58599854 Tm [( )] TJ ET EMC /P <</MCID 393 >> BDC BT 1 0 0 -1 141.90800476 276.58599854 Tm [(ICS8000)] TJ ET EMC /P <</MCID 394 >> BDC BT 1 0 0 -1 177.47000122 276.58599854 Tm [( )] TJ ET EMC /P <</MCID 395 >> BDC BT 1 0 0 -1 179.97000122 276.58599854 Tm [(from)] TJ ET EMC /P <</MCID 396 >> BDC BT 1 0 0 -1 199.40800476 276.58599854 Tm [( )] TJ ET EMC /P <</MCID 397 >> BDC BT 1 0 0 -1 201.90800476 276.58599854 Tm [(Anji\))] TJ ET EMC /P <</MCID 398 >> BDC BT 1 0 0 -1 223.01600647 276.58599854 Tm [( )] TJ ET EMC /P <</MCID 399 >> BDC BT 1 0 0 -1 0 292.18597412 Tm [(are)] TJ ET EMC /P <</MCID 400 >> BDC BT 1 0 0 -1 12.20699978 292.18597412 Tm [( )] TJ ET EMC /P <</MCID 401 >> BDC BT 1 0 0 -1 14.70699978 292.18597412 Tm [(tested)] TJ ET EMC /P <</MCID 402 >> BDC BT 1 0 0 -1 38.0320015 292.18597412 Tm [( )] TJ ET EMC /P <</MCID 403 >> BDC BT 1 0 0 -1 40.5320015 292.18597412 Tm [(in)] TJ ET EMC /P <</MCID 404 >> BDC BT 1 0 0 -1 48.31000137 292.18597412 Tm [( )] TJ ET EMC /P <</MCID 405 >> BDC BT 1 0 0 -1 50.81000137 292.18597412 Tm [(welcome银河国际网站)] TJ ET EMC /P <</MCID 406 >> BDC BT 1 0 0 -1 73.59300232 292.18597412 Tm [( )] TJ ET EMC /P <</MCID 407 >> BDC BT 1 0 0 -1 76.09300232 292.18597412 Tm [(300mm)] TJ ET EMC /P <</MCID 408 >> BDC BT 1 0 0 -1 106.65000153 292.18597412 Tm [( )] TJ ET EMC /P <</MCID 409 >> BDC BT 1 0 0 -1 109.15000153 292.18597412 Tm [(single)] TJ ET EMC /P <</MCID 410 >> BDC BT 1 0 0 -1 133.03700256 292.18597412 Tm [( )] TJ ET EMC /P <</MCID 411 >> BDC BT 1 0 0 -1 135.53700256 292.18597412 Tm [(clea)1(n)] TJ ET EMC /P <</MCID 412 >> BDC BT 1 0 0 -1 156.6309967 292.18597412 Tm [( )] TJ ET EMC /P <</MCID 413 >> BDC BT 1 0 0 -1 159.1309967 292.18597412 Tm [(tool.)] TJ ET EMC /P <</MCID 414 >> BDC BT 1 0 0 -1 177.18800354 292.18597412 Tm [( )] TJ ET EMC /P <</MCID 415 >> BDC BT 1 0 0 -1 179.68800354 292.18597412 Tm [(In)] TJ ET EMC /P <</MCID 416 >> BDC BT 1 0 0 -1 188.01800537 292.18597412 Tm [( )] TJ ET EMC /P <</MCID 417 >> BDC BT 1 0 0 -1 190.51800537 292.18597412 Tm [(the)] TJ ET EMC /P <</MCID 418 >> BDC BT 1 0 0 -1 202.73500061 292.18597412 Tm [( )] TJ ET EMC /P <</MCID 419 >> BDC BT 1 0 0 -1 205.23500061 292.18597412 Tm [(past,)] TJ ET EMC /P <</MCID 420 >> BDC BT 1 0 0 -1 223.84300232 292.18597412 Tm [( )] TJ ET EMC /P <</MCID 421 >> BDC BT 1 0 0 -1 0 307.78598022 Tm [(many)] TJ ET EMC /P <</MCID 422 >> BDC BT 1 0 0 -1 22.21699905 307.78598022 Tm [( )] TJ ET EMC /P <</MCID 423 >> BDC BT 1 0 0 -1 24.71699905 307.78598022 Tm [(factori)1(es)] TJ ET EMC /P <</MCID 424 >> BDC BT 1 0 0 -1 59.14099884 307.78598022 Tm [( )] TJ ET EMC /P <</MCID 425 >> BDC BT 1 0 0 -1 61.64099884 307.78598022 Tm [(struggled)] TJ ET EMC /P <</MCID 426 >> BDC BT 1 0 0 -1 98.85800171 307.78598022 Tm [( )] TJ ET EMC /P <</MCID 427 >> BDC BT 1 0 0 -1 101.35800171 307.78598022 Tm [(with)] TJ ET EMC /P <</MCID 428 >> BDC BT 1 0 0 -1 119.13600159 307.78598022 Tm [( )] TJ ET EMC /P <</MCID 429 >> BDC BT 1 0 0 -1 121.63600159 307.78598022 Tm [(the)] TJ ET EMC /P <</MCID 430 >> BDC BT 1 0 0 -1 133.85299683 307.78598022 Tm [( )] TJ ET EMC /P <</MCID 431 >> BDC BT 1 0 0 -1 136.35299683 307.78598022 Tm [(ball-t)1(ype)] TJ ET EMC /P <</MCID 432 >> BDC BT 1 0 0 -1 171.89500427 307.78598022 Tm [( )] TJ ET EMC /P <</MCID 433 >> BDC BT 1 0 0 -1 174.39500427 307.78598022 Tm [(defect)1(s)] TJ ET EMC /P <</MCID 434 >> BDC BT 1 0 0 -1 202.71000671 307.78598022 Tm [( )] TJ ET EMC /P <</MCID 435 >> BDC BT 1 0 0 -1 205.21000671 307.78598022 Tm [(when)] TJ ET EMC /P <</MCID 436 >> BDC BT 1 0 0 -1 226.86999512 307.78598022 Tm [( )] TJ ET EMC /P <</MCID 437 >> BDC BT 1 0 0 -1 0 323.38598633 Tm [(using)] TJ ET EMC /P <</MCID 438 >> BDC BT 1 0 0 -1 21.67000008 323.38598633 Tm [( )] TJ ET EMC /P <</MCID 439 >> BDC BT 1 0 0 -1 24.17000008 323.38598633 Tm [(ST250)] TJ ET EMC /P <</MCID 440 >> BDC BT 1 0 0 -1 50.84000015 323.38598633 Tm [( )] TJ ET EMC /P <</MCID 441 >> BDC BT 1 0 0 -1 53.34000015 323.38598633 Tm [(as)] TJ ET EMC /P <</MCID 442 >> BDC BT 1 0 0 -1 61.66999817 323.38598633 Tm [( )] TJ ET EMC /P <</MCID 443 >> BDC BT 1 0 0 -1 64.16999817 323.38598633 Tm [(post)] TJ ET EMC /P <</MCID 444 >> BDC BT 1 0 0 -1 80.83999634 323.38598633 Tm [( )] TJ ET EMC /P <</MCID 445 >> BDC BT 1 0 0 -1 83.33999634 323.38598633 Tm [(etch)] TJ ET EMC /P <</MCID 446 >> BDC BT 1 0 0 -1 99.99500275 323.38598633 Tm [( )] TJ ET EMC /P <</MCID 447 >> BDC BT 1 0 0 -1 102.49500275 323.38598633 Tm [(polymer)] TJ ET EMC /P <</MCID 448 >> BDC BT 1 0 0 -1 135.82000732 323.38598633 Tm [( )] TJ ET EMC /P <</MCID 449 >> BDC BT 1 0 0 -1 138.32000732 323.38598633 Tm [(remover.)] TJ ET EMC /P <</MCID 450 >> BDC BT 1 0 0 -1 174.13499451 323.38598633 Tm [( )] TJ ET EMC /P <</MCID 451 >> BDC BT 1 0 0 -1 176.63499451 323.38598633 Tm [(We)] TJ ET EMC /P <</MCID 452 >> BDC BT 1 0 0 -1 190.51199341 323.38598633 Tm [( )] TJ ET EMC /P <</MCID 453 >> BDC BT 1 0 0 -1 193.01199341 323.38598633 Tm [(keep)] TJ ET EMC /P <</MCID 454 >> BDC BT 1 0 0 -1 211.88900757 323.38598633 Tm [( )] TJ ET EMC /P <</MCID 455 >> BDC BT 1 0 0 -1 0 338.98599243 Tm [(addressing)] TJ ET EMC /P <</MCID 456 >> BDC BT 1 0 0 -1 42.76900101 338.98599243 Tm [( )] TJ ET EMC /P <</MCID 457 >> BDC BT 1 0 0 -1 45.26900101 338.98599243 Tm [(the)] TJ ET EMC /P <</MCID 458 >> BDC BT 1 0 0 -1 57.48600006 338.98599243 Tm [( )] TJ ET EMC /P <</MCID 459 >> BDC BT 1 0 0 -1 59.98600006 338.98599243 Tm [(ball-t)1(ype)] TJ ET EMC /P <</MCID 460 >> BDC BT 1 0 0 -1 95.52799988 338.98599243 Tm [( )] TJ ET EMC /P <</MCID 461 >> BDC BT 1 0 0 -1 98.02799988 338.98599243 Tm [(defect)1(s)] TJ ET EMC /P <</MCID 462 >> BDC BT 1 0 0 -1 126.34300232 338.98599243 Tm [( )] TJ ET EMC /P <</MCID 463 >> BDC BT 1 0 0 -1 128.84300232 338.98599243 Tm [(by)] TJ ET EMC /P <</MCID 464 >> BDC BT 1 0 0 -1 138.84300232 338.98599243 Tm [( )] TJ ET EMC /P <</MCID 465 >> BDC BT 1 0 0 -1 141.34300232 338.98599243 Tm [(proposing)] TJ ET EMC /P <</MCID 466 >> BDC BT 1 0 0 -1 181.34300232 338.98599243 Tm [( )] TJ ET EMC /P <</MCID 467 >> BDC BT 1 0 0 -1 183.84300232 338.98599243 Tm [(one)] TJ ET EMC /P <</MCID 468 >> BDC BT 1 0 0 -1 198.28100586 338.98599243 Tm [( )] TJ ET EMC /P <</MCID 469 >> BDC BT 1 0 0 -1 0 354.58599854 Tm [(possible)] TJ ET EMC /P <</MCID 470 >> BDC BT 1 0 0 -1 32.77799988 354.58599854 Tm [( )] TJ ET EMC /P <</MCID 471 >> BDC BT 1 0 0 -1 35.27799988 354.58599854 Tm [(failure)] TJ ET EMC /P <</MCID 472 >> BDC BT 1 0 0 -1 61.37200165 354.58599854 Tm [( )] TJ ET EMC /P <</MCID 473 >> BDC BT 1 0 0 -1 63.87200165 354.58599854 Tm [(mecha)1(nism)] TJ ET EMC /P <</MCID 474 >> BDC BT 1 0 0 -1 109.41400146 354.58599854 Tm [( )] TJ ET EMC /P <</MCID 475 >> BDC BT 1 0 0 -1 111.91400146 354.58599854 Tm [(and)] TJ ET EMC /P <</MCID 476 >> BDC BT 1 0 0 -1 126.35199738 354.58599854 Tm [( )] TJ ET EMC /P <</MCID 477 >> BDC BT 1 0 0 -1 128.852005 354.58599854 Tm [(presenting)] TJ ET EMC /P <</MCID 478 >> BDC BT 1 0 0 -1 170.50700378 354.58599854 Tm [( )] TJ ET EMC /P <</MCID 479 >> BDC BT 1 0 0 -1 173.00700378 354.58599854 Tm [(several)] TJ ET EMC /P <</MCID 480 >> BDC BT 1 0 0 -1 201.32200623 354.58599854 Tm [( )] TJ ET EMC /P <</MCID 481 >> BDC BT 1 0 0 -1 0 370.18597412 Tm [(solutions.)] TJ ET EMC /P <</MCID 482 >> BDC BT 1 0 0 -1 38.61800003 370.18597412 Tm [( )] TJ ET EMC /P <</MCID 483 >> BDC BT 1 0 0 -1 41.11800003 370.18597412 Tm [(The)] TJ ET EMC /P <</MCID 484 >> BDC BT 1 0 0 -1 56.66500092 370.18597412 Tm [( )] TJ ET EMC /P <</MCID 485 >> BDC BT 1 0 0 -1 59.16500092 370.18597412 Tm [(photo-assistant)] TJ ET EMC /P <</MCID 486 >> BDC BT 1 0 0 -1 119.16000366 370.18597412 Tm [( )] TJ ET EMC /P <</MCID 487 >> BDC BT 1 0 0 -1 121.66000366 370.18597412 Tm [(copper)] TJ ET EMC /P <</MCID 488 >> BDC BT 1 0 0 -1 148.86700439 370.18597412 Tm [( )] TJ ET EMC /P <</MCID 489 >> BDC BT 1 0 0 -1 151.36700439 370.18597412 Tm [(corrosion)] TJ ET EMC /P <</MCID 490 >> BDC BT 1 0 0 -1 189.13600159 370.18597412 Tm [( )] TJ ET EMC /P <</MCID 491 >> BDC BT 1 0 0 -1 191.63600159 370.18597412 Tm [(and)] TJ ET EMC /P <</MCID 492 >> BDC BT 1 0 0 -1 206.07400513 370.18597412 Tm [( )] TJ ET EMC /P <</MCID 493 >> BDC BT 1 0 0 -1 0 385.78598022 Tm [(potenti)1(al)] TJ ET EMC /P <</MCID 494 >> BDC BT 1 0 0 -1 34.99000168 385.78598022 Tm [( )] TJ ET EMC /P <</MCID 495 >> BDC BT 1 0 0 -1 37.49000168 385.78598022 Tm [(chemi)1(cal)] TJ ET EMC /P <</MCID 496 >> BDC BT 1 0 0 -1 73.57900238 385.78598022 Tm [( )] TJ ET EMC /P <</MCID 497 >> BDC BT 1 0 0 -1 76.07900238 385.78598022 Tm [(residue)] TJ ET EMC /P <</MCID 498 >> BDC BT 1 0 0 -1 104.95600128 385.78598022 Tm [( )] TJ ET EMC /P <</MCID 499 >> BDC BT 1 0 0 -1 107.45600128 385.78598022 Tm [(problem)] TJ ET EMC /P <</MCID 500 >> BDC BT 1 0 0 -1 140.78100586 385.78598022 Tm [( )] TJ ET EMC /P <</MCID 501 >> BDC BT 1 0 0 -1 143.28100586 385.78598022 Tm [(are)] TJ ET EMC /P <</MCID 502 >> BDC BT 1 0 0 -1 155.48800659 385.78598022 Tm [( )] TJ ET EMC /P <</MCID 503 >> BDC BT 1 0 0 -1 157.98800659 385.78598022 Tm [(also)] TJ ET EMC /P <</MCID 504 >> BDC BT 1 0 0 -1 174.09599304 385.78598022 Tm [( )] TJ ET EMC /P <</MCID 505 >> BDC BT 1 0 0 -1 176.59599304 385.78598022 Tm [(discussed.)] TJ ET EMC /P <</MCID 506 >> BDC BT 1 0 0 -1 217.42599487 385.78598022 Tm /GS15 gs 0 g [( )] TJ ET EMC Q q 1 0 0 1 0 405.6000061 cm /P <</MCID 507 >> BDC BT /FAAABG 10 Tf 1 0 0 -1 0 11.38599968 Tm [( )] TJ ET EMC Q q 1 0 0 1 0 421.20001221 cm /P <</MCID 508 >> BDC BT 1 0 0 -1 0 11.74499989 Tm /GS16 gs 0 g [(1.)] TJ ET EMC /P <</MCID 509 >> BDC BT 1 0 0 -1 8.25 11.74499989 Tm [( )] TJ ET EMC /P <</MCID 510 >> BDC BT 1 0 0 -1 11 11.74499989 Tm [(Introduction)] TJ ET EMC /P <</MCID 511 >> BDC BT 1 0 0 -1 70.89800262 11.74499989 Tm /GS17 gs 0 g [( )] TJ ET EMC Q q 1 0 0 1 0 436.79998779 cm /P <</MCID 512 >> BDC BT /FAAABG 10 Tf 1 0 0 -1 0 11.38599968 Tm /GS18 gs 0 g [(Wet)] TJ ET EMC /P <</MCID 513 >> BDC BT 1 0 0 -1 16.65500069 11.38599968 Tm [( )] TJ ET EMC /P <</MCID 514 >> BDC BT 1 0 0 -1 19.15500069 11.38599968 Tm [(chemi)1(s)-1(t)1(ry)] TJ ET EMC /P <</MCID 515 >> BDC BT 1 0 0 -1 58.5890007 11.38599968 Tm [( )] TJ ET EMC /P <</MCID 516 >> BDC BT 1 0 0 -1 61.0890007 11.38599968 Tm [(post-etch)] TJ ET EMC /P <</MCID 517 >> BDC BT 1 0 0 -1 97.7440033 11.38599968 Tm [( )] TJ ET EMC /P <</MCID 518 >> BDC BT 1 0 0 -1 100.2440033 11.38599968 Tm [(clea)1(n)] TJ ET EMC /P <</MCID 519 >> BDC BT 1 0 0 -1 121.33799744 11.38599968 Tm [( )] TJ ET EMC /P <</MCID 520 >> BDC BT 1 0 0 -1 123.83799744 11.38599968 Tm [(is)] TJ ET EMC /P <</MCID 521 >> BDC BT 1 0 0 -1 130.50799561 11.38599968 Tm [( )] TJ ET EMC /P <</MCID 522 >> BDC BT 1 0 0 -1 133.00799561 11.38599968 Tm [(vital)] TJ ET EMC /P <</MCID 523 >> BDC BT 1 0 0 -1 150.78100586 11.38599968 Tm [( )] TJ ET EMC /P <</MCID 524 >> BDC BT 1 0 0 -1 153.28100586 11.38599968 Tm [(in)] TJ ET EMC /P <</MCID 525 >> BDC BT 1 0 0 -1 161.05900574 11.38599968 Tm [( )] TJ ET EMC /P <</MCID 526 >> BDC BT 1 0 0 -1 163.55900574 11.38599968 Tm [(BEOL)] TJ ET EMC /P <</MCID 527 >> BDC BT 1 0 0 -1 189.66700745 11.38599968 Tm [( )] TJ ET EMC /P <</MCID 528 >> BDC BT 1 0 0 -1 192.16700745 11.38599968 Tm [(process.)] TJ ET EMC /P <</MCID 529 >> BDC BT 1 0 0 -1 224.65699768 11.38599968 Tm [( )] TJ ET EMC /P <</MCID 530 >> BDC BT 1 0 0 -1 0 26.98600006 Tm [(At)] TJ ET EMC /P <</MCID 531 >> BDC BT 1 0 0 -1 10 26.98600006 Tm [( )] TJ ET EMC /P <</MCID 532 >> BDC BT 1 0 0 -1 12.5 26.98600006 Tm [(almost)] TJ ET EMC /P <</MCID 533 >> BDC BT 1 0 0 -1 39.16500092 26.98600006 Tm [( )] TJ ET EMC /P <</MCID 534 >> BDC BT 1 0 0 -1 41.66500092 26.98600006 Tm [(every)] TJ ET EMC /P <</MCID 535 >> BDC BT 1 0 0 -1 63.87200165 26.98600006 Tm [( )] TJ ET EMC /P <</MCID 536 >> BDC BT 1 0 0 -1 66.37200165 26.98600006 Tm [(few)] TJ ET EMC /P <</MCID 537 >> BDC BT 1 0 0 -1 81.36199951 26.98600006 Tm [( )] TJ ET EMC /P <</MCID 538 >> BDC BT 1 0 0 -1 83.86199951 26.98600006 Tm [(steps)] TJ ET EMC /P <</MCID 539 >> BDC BT 1 0 0 -1 103.86199951 26.98600006 Tm [( )] TJ ET EMC /P <</MCID 540 >> BDC BT 1 0 0 -1 106.36199951 26.98600006 Tm [(during)] TJ ET EMC /P <</MCID 541 >> BDC BT 1 0 0 -1 132.47000122 26.98600006 Tm [( )] TJ ET EMC /P <</MCID 542 >> BDC BT 1 0 0 -1 134.97000122 26.98600006 Tm [(the)] TJ ET EMC /P <</MCID 543 >> BDC BT 1 0 0 -1 147.18699646 26.98600006 Tm [( )] TJ ET EMC /P <</MCID 544 >> BDC BT 1 0 0 -1 149.68699646 26.98600006 Tm [(procedure,)] TJ ET EMC /P <</MCID 545 >> BDC BT 1 0 0 -1 192.16299438 26.98600006 Tm [( )] TJ ET EMC /P <</MCID 546 >> BDC BT 1 0 0 -1 194.66299438 26.98600006 Tm [(clea)1(ning)] TJ ET EMC /P <</MCID 547 >> BDC BT 1 0 0 -1 228.53500366 26.98600006 Tm [( )] TJ ET EMC /P <</MCID 548 >> BDC BT 1 0 0 -1 0 42.58599854 Tm [(is)] TJ ET EMC /P <</MCID 549 >> BDC BT 1 0 0 -1 6.67000008 42.58599854 Tm [( )] TJ ET EMC /P <</MCID 550 >> BDC BT 1 0 0 -1 9.17000008 42.58599854 Tm [(involved.)] TJ ET EMC /P <</MCID 551 >> BDC BT 1 0 0 -1 46.66500092 42.58599854 Tm [( )] TJ ET EMC /P <</MCID 552 >> BDC BT 1 0 0 -1 49.16500092 42.58599854 Tm [(The)] TJ ET EMC /P <</MCID 553 >> BDC BT 1 0 0 -1 64.71199799 42.58599854 Tm [( )] TJ ET EMC /P <</MCID 554 >> BDC BT 1 0 0 -1 67.21199799 42.58599854 Tm [(qualit)1(y)] TJ ET EMC /P <</MCID 555 >> BDC BT 1 0 0 -1 94.98500061 42.58599854 Tm [( )] TJ ET EMC /P <</MCID 556 >> BDC BT 1 0 0 -1 97.48500061 42.58599854 Tm [(of)] TJ ET EMC /P <</MCID 557 >> BDC BT 1 0 0 -1 105.81500244 42.58599854 Tm [( )] TJ ET EMC /P <</MCID 558 >> BDC BT 1 0 0 -1 108.31500244 42.58599854 Tm [(silicon)] TJ ET EMC /P <</MCID 559 >> BDC BT 1 0 0 -1 134.97999573 42.58599854 Tm [( )] TJ ET EMC /P <</MCID 560 >> BDC BT 1 0 0 -1 137.47999573 42.58599854 Tm [(wafer)] TJ ET EMC /P <</MCID 561 >> BDC BT 1 0 0 -1 160.23899841 42.58599854 Tm [( )] TJ ET EMC /P <</MCID 562 >> BDC BT 1 0 0 -1 162.73899841 42.58599854 Tm [(clea)1(ning)] TJ ET EMC /P <</MCID 563 >> BDC BT 1 0 0 -1 196.61099243 42.58599854 Tm [( )] TJ ET EMC /P <</MCID 564 >> BDC BT 1 0 0 -1 199.11099243 42.58599854 Tm [(direct)1(ly)] TJ ET EMC /P <</MCID 565 >> BDC BT 1 0 0 -1 229.65299988 42.58599854 Tm [( )] TJ ET EMC /P <</MCID 566 >> BDC BT 1 0 0 -1 0 58.18599701 Tm [(impac)1(ts)] TJ ET EMC /P <</MCID 567 >> BDC BT 1 0 0 -1 31.10400009 58.18599701 Tm [( )] TJ ET EMC /P <</MCID 568 >> BDC BT 1 0 0 -1 33.60400009 58.18599701 Tm [(the)] TJ ET EMC /P <</MCID 569 >> BDC BT 1 0 0 -1 45.82099915 58.18599701 Tm [( )] TJ ET EMC /P <</MCID 570 >> BDC BT 1 0 0 -1 48.32099915 58.18599701 Tm [(device)1(抯)] TJ ET EMC /P <</MCID 571 >> BDC BT 1 0 0 -1 81.63600159 58.18599701 Tm [( )] TJ ET EMC /P <</MCID 572 >> BDC BT 1 0 0 -1 84.13600159 58.18599701 Tm [(yield)] TJ ET EMC /P <</MCID 573 >> BDC BT 1 0 0 -1 104.1309967 58.18599701 Tm [( )] TJ ET EMC /P <</MCID 574 >> BDC BT 1 0 0 -1 106.6309967 58.18599701 Tm [(and)] TJ ET EMC /P <</MCID 575 >> BDC BT 1 0 0 -1 121.06900024 58.18599701 Tm [( )] TJ ET EMC /P <</MCID 576 >> BDC BT 1 0 0 -1 123.56900024 58.18599701 Tm [(relia)1(bility.)] TJ ET EMC /P <</MCID 577 >> BDC BT 1 0 0 -1 164.94599915 58.18599701 Tm [( )] TJ ET EMC /P <</MCID 578 >> BDC BT 1 0 0 -1 167.44599915 58.18599701 Tm [(According)] TJ ET EMC /P <</MCID 579 >> BDC BT 1 0 0 -1 209.65299988 58.18599701 Tm [( )] TJ ET EMC /P <</MCID 580 >> BDC BT 1 0 0 -1 212.15299988 58.18599701 Tm [(to)] TJ ET EMC /P <</MCID 581 >> BDC BT 1 0 0 -1 219.93099976 58.18599701 Tm [( )] TJ ET EMC /P <</MCID 582 >> BDC BT 1 0 0 -1 0 73.78600311 Tm [(C.F.)] TJ ET EMC /P <</MCID 583 >> BDC BT 1 0 0 -1 17.2310009 73.78600311 Tm [( )] TJ ET EMC /P <</MCID 584 >> BDC BT 1 0 0 -1 19.7310009 73.78600311 Tm [(Tsang)] TJ ET EMC /P <</MCID 585 >> BDC BT 1 0 0 -1 44.16899872 73.78600311 Tm [( )] TJ ET EMC /P <</MCID 586 >> BDC BT 1 0 0 -1 46.66899872 73.78600311 Tm [(et)] TJ ET EMC /P <</MCID 587 >> BDC BT 1 0 0 -1 53.88600159 73.78600311 Tm [( )] TJ ET EMC /P <</MCID 588 >> BDC BT 1 0 0 -1 56.38600159 73.78600311 Tm [(al,)] TJ ET EMC /P <</MCID 589 >> BDC BT 1 0 0 -1 66.10299683 73.78600311 Tm [( )] TJ ET EMC /P <</MCID 590 >> BDC BT 1 0 0 -1 68.60299683 73.78600311 Tm [(there)] TJ ET EMC /P <</MCID 591 >> BDC BT 1 0 0 -1 88.58799744 73.78600311 Tm [( )] TJ ET EMC /P <</MCID 592 >> BDC BT 1 0 0 -1 91.08799744 73.78600311 Tm [(are)] TJ ET EMC /P <</MCID 593 >> BDC BT 1 0 0 -1 103.29499817 73.78600311 Tm [( )] TJ ET EMC /P <</MCID 594 >> BDC BT 1 0 0 -1 105.79499817 73.78600311 Tm [(three)] TJ ET EMC /P <</MCID 595 >> BDC BT 1 0 0 -1 125.77999878 73.78600311 Tm [( )] TJ ET EMC /P <</MCID 596 >> BDC BT 1 0 0 -1 128.27999878 73.78600311 Tm [(main)] TJ ET EMC /P <</MCID 597 >> BDC BT 1 0 0 -1 148.2749939 73.78600311 Tm [( )] TJ ET EMC /P <</MCID 598 >> BDC BT 1 0 0 -1 150.7749939 73.78600311 Tm [(wet)] TJ ET EMC /P <</MCID 599 >> BDC BT 1 0 0 -1 165.21299744 73.78600311 Tm [( )] TJ ET EMC /P <</MCID 600 >> BDC BT 1 0 0 -1 167.71299744 73.78600311 Tm [(clea)1(n)] TJ ET EMC /P <</MCID 601 >> BDC BT 1 0 0 -1 188.80700684 73.78600311 Tm [( )] TJ ET EMC /P <</MCID 602 >> BDC BT 1 0 0 -1 191.30700684 73.78600311 Tm [(processes)] TJ ET EMC /P <</MCID 603 >> BDC BT 1 0 0 -1 229.6269989 73.78600311 Tm [( )] TJ ET EMC /P <</MCID 604 >> BDC BT 1 0 0 -1 0 89.38600159 Tm [(which)] TJ ET EMC /P <</MCID 605 >> BDC BT 1 0 0 -1 24.43799973 89.38600159 Tm [( )] TJ ET EMC /P <</MCID 606 >> BDC BT 1 0 0 -1 26.93799973 89.38600159 Tm [(involve)] TJ ET EMC /P <</MCID 607 >> BDC BT 1 0 0 -1 56.93299866 89.38600159 Tm [( )] TJ ET EMC /P <</MCID 608 >> BDC BT 1 0 0 -1 59.43299866 89.38600159 Tm [(the)] TJ ET EMC /P <</MCID 609 >> BDC BT 1 0 0 -1 71.65000153 89.38600159 Tm [( )] TJ ET EMC /P <</MCID 610 >> BDC BT 1 0 0 -1 74.15000153 89.38600159 Tm [(dual)] TJ ET EMC /P <</MCID 611 >> BDC BT 1 0 0 -1 91.36699677 89.38600159 Tm [( )] TJ ET EMC /P <</MCID 612 >> BDC BT 1 0 0 -1 93.86699677 89.38600159 Tm [(damasce)1(ne)] TJ ET EMC /P <</MCID 613 >> BDC BT 1 0 0 -1 137.72900391 89.38600159 Tm [( )] TJ ET EMC /P <</MCID 614 >> BDC BT 1 0 0 -1 140.22900391 89.38600159 Tm [(structure)] TJ ET EMC /P <</MCID 615 >> BDC BT 1 0 0 -1 175.21400452 89.38600159 Tm [( )] TJ ET EMC /P <</MCID 616 >> BDC BT 1 0 0 -1 177.71400452 89.38600159 Tm [(formati)1(on.)] TJ ET EMC /P <</MCID 617 >> BDC BT 1 0 0 -1 219.647995 89.38600159 Tm [( )] TJ ET EMC /P <</MCID 618 >> BDC BT 1 0 0 -1 0 104.98600006 Tm [(These)] TJ ET EMC /P <</MCID 619 >> BDC BT 1 0 0 -1 23.87700081 104.98600006 Tm [( )] TJ ET EMC /P <</MCID 620 >> BDC BT 1 0 0 -1 26.37700081 104.98600006 Tm [(steps)] TJ ET EMC /P <</MCID 621 >> BDC BT 1 0 0 -1 46.3769989 104.98600006 Tm [( )] TJ ET EMC /P <</MCID 622 >> BDC BT 1 0 0 -1 48.8769989 104.98600006 Tm [(are)] TJ ET EMC /P <</MCID 623 >> BDC BT 1 0 0 -1 61.08399963 104.98600006 Tm [( )] TJ ET EMC /P <</MCID 624 >> BDC BT 1 0 0 -1 63.58399963 104.98600006 Tm [(post-via)] TJ ET EMC /P <</MCID 625 >> BDC BT 1 0 0 -1 95.8010025 104.98600006 Tm [( )] TJ ET EMC /P <</MCID 626 >> BDC BT 1 0 0 -1 98.3010025 104.98600006 Tm [(etch,)] TJ ET EMC /P <</MCID 627 >> BDC BT 1 0 0 -1 117.45600128 104.98600006 Tm [( )] TJ ET EMC /P <</MCID 628 >> BDC BT 1 0 0 -1 119.95600128 104.98600006 Tm [(post-trench)] TJ ET EMC /P <</MCID 629 >> BDC BT 1 0 0 -1 164.94099426 104.98600006 Tm [( )] TJ ET EMC /P <</MCID 630 >> BDC BT 1 0 0 -1 167.44099426 104.98600006 Tm [(etch,)] TJ ET EMC /P <</MCID 631 >> BDC BT 1 0 0 -1 186.59599304 104.98600006 Tm [( )] TJ ET EMC /P <</MCID 632 >> BDC BT 1 0 0 -1 189.09599304 104.98600006 Tm [(and)] TJ ET EMC /P <</MCID 633 >> BDC BT 1 0 0 -1 203.53399658 104.98600006 Tm [( )] TJ ET EMC /P <</MCID 634 >> BDC BT 1 0 0 -1 206.03399658 104.98600006 Tm [(post)] TJ ET EMC /P <</MCID 635 >> BDC BT 1 0 0 -1 222.70399475 104.98600006 Tm [( )] TJ ET EMC /P <</MCID 636 >> BDC BT 1 0 0 -1 0 120.58599854 Tm [(Cu)] TJ ET EMC /P <</MCID 637 >> BDC BT 1 0 0 -1 11.67000008 120.58599854 Tm [( )] TJ ET EMC /P <</MCID 638 >> BDC BT 1 0 0 -1 14.17000008 120.58599854 Tm [(cap)] TJ ET EMC /P <</MCID 639 >> BDC BT 1 0 0 -1 28.04700089 120.58599854 Tm [( )] TJ ET EMC /P <</MCID 640 >> BDC BT 1 0 0 -1 30.54700089 120.58599854 Tm [(etch)] TJ ET EMC /P <</MCID 641 >> BDC BT 1 0 0 -1 47.20199966 120.58599854 Tm [( )] TJ ET EMC /P <</MCID 642 >> BDC BT 1 0 0 -1 49.70199966 120.58599854 Tm [(respecti)1(vely)] TJ ET EMC /P <</MCID 643 >> BDC BT 1 0 0 -1 98.01300049 120.58599854 Tm [( )] TJ ET EMC /P <</MCID 644 >> BDC BT 1 0 0 -1 100.51300049 120.58599854 Tm [([1])] TJ ET EMC /P <</MCID 645 >> BDC BT 1 0 0 -1 112.17299652 120.58599854 Tm [(.)] TJ ET EMC /P <</MCID 646 >> BDC BT 1 0 0 -1 114.67299652 120.58599854 Tm [( )] TJ ET EMC /P <</MCID 647 >> BDC BT 1 0 0 -1 117.17299652 120.58599854 Tm [(By)] TJ ET EMC /P <</MCID 648 >> BDC BT 1 0 0 -1 128.84300232 120.58599854 Tm [( )] TJ ET EMC /P <</MCID 649 >> BDC BT 1 0 0 -1 131.34300232 120.58599854 Tm [(undergoing)] TJ ET EMC /P <</MCID 650 >> BDC BT 1 0 0 -1 176.88999939 120.58599854 Tm [( )] TJ ET EMC /P <</MCID 651 >> BDC BT 1 0 0 -1 179.38999939 120.58599854 Tm [(dry)] TJ ET EMC /P <</MCID 652 >> BDC BT 1 0 0 -1 192.72000122 120.58599854 Tm [( )] TJ ET EMC /P <</MCID 653 >> BDC BT 1 0 0 -1 195.22000122 120.58599854 Tm [(etch,)] TJ ET EMC /P <</MCID 654 >> BDC BT 1 0 0 -1 214.375 120.58599854 Tm [( )] TJ ET EMC /P <</MCID 655 >> BDC BT 1 0 0 -1 216.875 120.58599854 Tm [(the)] TJ ET EMC /P <</MCID 656 >> BDC BT 1 0 0 -1 229.09199524 120.58599854 Tm [( )] TJ ET EMC /P <</MCID 657 >> BDC BT 1 0 0 -1 0 136.18600464 Tm [(by-products)] TJ ET EMC /P <</MCID 658 >> BDC BT 1 0 0 -1 47.76900101 136.18600464 Tm [( )] TJ ET EMC /P <</MCID 659 >> BDC BT 1 0 0 -1 50.26900101 136.18600464 Tm [(such)] TJ ET EMC /P <</MCID 660 >> BDC BT 1 0 0 -1 68.59899902 136.18600464 Tm [( )] TJ ET EMC /P <</MCID 661 >> BDC BT 1 0 0 -1 71.09899902 136.18600464 Tm [(as)] TJ ET EMC /P <</MCID 662 >> BDC BT 1 0 0 -1 79.42900085 136.18600464 Tm [( )] TJ ET EMC /P <</MCID 663 >> BDC BT 1 0 0 -1 81.92900085 136.18600464 Tm [(CF)] TJ ET EMC /P <</MCID 664 >> BDC BT /FAAAEF 6.5 Tf 1 0 0 -1 94.16000366 137.68600464 Tm [(x)] TJ ET EMC /P <</MCID 665 >> BDC BT /FAAABG 10 Tf 1 0 0 -1 97.04499817 136.18600464 Tm [(,)] TJ ET EMC /P <</MCID 666 >> BDC BT 1 0 0 -1 99.54499817 136.18600464 Tm [( )] TJ ET EMC /P <</MCID 667 >> BDC BT 1 0 0 -1 102.04499817 136.18600464 Tm [(CuF)] TJ ET EMC /P <</MCID 668 >> BDC BT /FAAAEF 6.5 Tf 1 0 0 -1 119.27600098 137.68600464 Tm [(x)] TJ ET EMC /P <</MCID 669 >> BDC BT /FAAABG 10 Tf 1 0 0 -1 122.16100311 136.18600464 Tm [(,)] TJ ET EMC /P <</MCID 670 >> BDC BT 1 0 0 -1 124.66100311 136.18600464 Tm [( )] TJ ET EMC /P <</MCID 671 >> BDC BT 1 0 0 -1 127.16100311 136.18600464 Tm [(CuO,)] TJ ET EMC /P <</MCID 672 >> BDC BT 1 0 0 -1 148.55299377 136.18600464 Tm [( )] TJ ET EMC /P <</MCID 673 >> BDC BT 1 0 0 -1 151.05299377 136.18600464 Tm [(Cu)] TJ ET EMC /P <</MCID 674 >> BDC BT /FAAAEF 6.5 Tf 1 0 0 -1 162.7230072 137.68600464 Tm [(x)] TJ ET EMC /P <</MCID 675 >> BDC BT /FAAABG 10 Tf 1 0 0 -1 165.60800171 136.18600464 Tm [(O,)] TJ ET EMC /P <</MCID 676 >> BDC BT 1 0 0 -1 175.33000183 136.18600464 Tm [( )] TJ ET EMC /P <</MCID 677 >> BDC BT 1 0 0 -1 177.83000183 136.18600464 Tm [(polymeri)1(c)] TJ ET EMC /P <</MCID 678 >> BDC BT 1 0 0 -1 218.37199402 136.18600464 Tm [( )] TJ ET EMC /P <</MCID 679 >> BDC BT 1 0 0 -1 0 151.78599548 Tm [(residues)] TJ ET EMC /P <</MCID 680 >> BDC BT 1 0 0 -1 32.76900101 151.78599548 Tm [( )] TJ ET EMC /P <</MCID 681 >> BDC BT 1 0 0 -1 35.26900101 151.78599548 Tm [(and)] TJ ET EMC /P <</MCID 682 >> BDC BT 1 0 0 -1 49.70700073 151.78599548 Tm [( )] TJ ET EMC /P <</MCID 683 >> BDC BT 1 0 0 -1 52.20700073 151.78599548 Tm [(re-sputtere)1(d)] TJ ET EMC /P <</MCID 684 >> BDC BT 1 0 0 -1 99.96099854 151.78599548 Tm [( )] TJ ET EMC /P <</MCID 685 >> BDC BT 1 0 0 -1 102.46099854 151.78599548 Tm [(Cu)] TJ ET EMC /P <</MCID 686 >> BDC BT 1 0 0 -1 114.1309967 151.78599548 Tm [( )] TJ ET EMC /P <</MCID 687 >> BDC BT 1 0 0 -1 116.6309967 151.78599548 Tm [(are)] TJ ET EMC /P <</MCID 688 >> BDC BT 1 0 0 -1 128.83799744 151.78599548 Tm [( )] TJ ET EMC /P <</MCID 689 >> BDC BT 1 0 0 -1 131.33799744 151.78599548 Tm [(formed)] TJ ET EMC /P <</MCID 690 >> BDC BT 1 0 0 -1 160.21499634 151.78599548 Tm [( )] TJ ET EMC /P <</MCID 691 >> BDC BT 1 0 0 -1 162.71499634 151.78599548 Tm [([2])] TJ ET EMC /P <</MCID 692 >> BDC BT 1 0 0 -1 174.375 151.78599548 Tm [( )] TJ ET EMC /P <</MCID 693 >> BDC BT 1 0 0 -1 176.875 151.78599548 Tm [([3])] TJ ET EMC /P <</MCID 694 >> BDC BT 1 0 0 -1 188.53500366 151.78599548 Tm [(.)] TJ ET EMC /P <</MCID 695 >> BDC BT 1 0 0 -1 191.03500366 151.78599548 Tm [( )] TJ ET EMC /P <</MCID 696 >> BDC BT 1 0 0 -1 0 167.38600159 Tm [(Generall)1(y,)] TJ ET EMC /P <</MCID 697 >> BDC BT 1 0 0 -1 41.92399979 167.38600159 Tm [( )] TJ ET EMC /P <</MCID 698 >> BDC BT 1 0 0 -1 44.42399979 167.38600159 Tm [(the)] TJ ET EMC /P <</MCID 699 >> BDC BT 1 0 0 -1 56.64099884 167.38600159 Tm [( )] TJ ET EMC /P <</MCID 700 >> BDC BT 1 0 0 -1 59.14099884 167.38600159 Tm [(wafer抯)] TJ ET EMC /P <</MCID 701 >> BDC BT 1 0 0 -1 89.1210022 167.38600159 Tm [( )] TJ ET EMC /P <</MCID 702 >> BDC BT 1 0 0 -1 91.6210022 167.38600159 Tm [(contam)1(ination)] TJ ET EMC /P <</MCID 703 >> BDC BT 1 0 0 -1 148.82800293 167.38600159 Tm [( )] TJ ET EMC /P <</MCID 704 >> BDC BT 1 0 0 -1 151.32800293 167.38600159 Tm [(from)] TJ ET EMC /P <</MCID 705 >> BDC BT 1 0 0 -1 170.76600647 167.38600159 Tm [( )] TJ ET EMC /P <</MCID 706 >> BDC BT 1 0 0 -1 173.26600647 167.38600159 Tm [(by-products)] TJ ET EMC /P <</MCID 707 >> BDC BT 1 0 0 -1 221.03500366 167.38600159 Tm [( )] TJ ET EMC /P <</MCID 708 >> BDC BT 1 0 0 -1 223.53500366 167.38600159 Tm [(is)] TJ ET EMC /P <</MCID 709 >> BDC BT 1 0 0 -1 230.20500183 167.38600159 Tm [( )] TJ ET EMC /P <</MCID 710 >> BDC BT 1 0 0 -1 0 182.98600769 Tm [(usually)] TJ ET EMC /P <</MCID 711 >> BDC BT 1 0 0 -1 28.88699913 182.98600769 Tm [( )] TJ ET EMC /P <</MCID 712 >> BDC BT 1 0 0 -1 31.38699913 182.98600769 Tm [(inevit)1(able.)] TJ ET EMC /P <</MCID 713 >> BDC BT 1 0 0 -1 73.31600189 182.98600769 Tm /GS19 gs 0 g [( )] TJ ET EMC Q q 1 0 0 1 251.57499695 0 cm /P <</MCID 714 >> BDC BT /FAAABG 10 Tf 1 0 0 -1 0 11.38599968 Tm [( )] TJ ET EMC q 1 0 0 1 0 15.60000038 cm /P <</MCID 715 >> BDC BT 1 0 0 -1 0 11.38599968 Tm /GS20 gs 0 g [(The)] TJ ET EMC /P <</MCID 716 >> BDC BT 1 0 0 -1 15.54699993 11.38599968 Tm [( )] TJ ET EMC /P <</MCID 717 >> BDC BT 1 0 0 -1 18.04700089 11.38599968 Tm [(single-wafer)] TJ ET EMC /P <</MCID 718 >> BDC BT 1 0 0 -1 68.02300262 11.38599968 Tm [( )] TJ ET EMC /P <</MCID 719 >> BDC BT 1 0 0 -1 70.52300262 11.38599968 Tm [(spin)] TJ ET EMC /P <</MCID 720 >> BDC BT 1 0 0 -1 87.19300079 11.38599968 Tm [( )] TJ ET EMC /P <</MCID 721 >> BDC BT 1 0 0 -1 89.69300079 11.38599968 Tm [(clea)1(ning)] TJ ET EMC /P <</MCID 722 >> BDC BT 1 0 0 -1 123.56500244 11.38599968 Tm [( )] TJ ET EMC /P <</MCID 723 >> BDC BT 1 0 0 -1 126.06500244 11.38599968 Tm [(tool)] TJ ET EMC /P <</MCID 724 >> BDC BT 1 0 0 -1 141.62199402 11.38599968 Tm [( )] TJ ET EMC /P <</MCID 725 >> BDC BT 1 0 0 -1 144.12199402 11.38599968 Tm [(\(Ultra)] TJ ET EMC /P <</MCID 726 >> BDC BT 1 0 0 -1 167.99899292 11.38599968 Tm [( )] TJ ET EMC /P <</MCID 727 >> BDC BT 1 0 0 -1 170.49899292 11.38599968 Tm [(C)] TJ ET EMC /P <</MCID 728 >> BDC BT 1 0 0 -1 177.16900635 11.38599968 Tm [( )] TJ ET EMC /P <</MCID 729 >> BDC BT 1 0 0 -1 179.66900635 11.38599968 Tm [(II)] TJ ET EMC /P <</MCID 730 >> BDC BT 1 0 0 -1 186.32899475 11.38599968 Tm [(\))] TJ ET EMC /P <</MCID 731 >> BDC BT 1 0 0 -1 189.65899658 11.38599968 Tm [( )] TJ ET EMC /P <</MCID 732 >> BDC BT 1 0 0 -1 192.15899658 11.38599968 Tm [(used)] TJ ET EMC /P <</MCID 733 >> BDC BT 1 0 0 -1 210.48899841 11.38599968 Tm [( )] TJ ET EMC /P <</MCID 734 >> BDC BT 1 0 0 -1 212.98899841 11.38599968 Tm [(in)] TJ ET EMC /P <</MCID 735 >> BDC BT 1 0 0 -1 220.76699829 11.38599968 Tm [( )] TJ ET EMC /P <</MCID 736 >> BDC BT 1 0 0 -1 0 26.98600006 Tm [(this)] TJ ET EMC /P <</MCID 737 >> BDC BT 1 0 0 -1 14.44799995 26.98600006 Tm [( )] TJ ET EMC /P <</MCID 738 >> BDC BT 1 0 0 -1 16.94799995 26.98600006 Tm [(artic)1(le)] TJ ET EMC /P <</MCID 739 >> BDC BT 1 0 0 -1 41.9280014 26.98600006 Tm [( )] TJ ET EMC /P <</MCID 740 >> BDC BT 1 0 0 -1 44.4280014 26.98600006 Tm [(is)] TJ ET EMC /P <</MCID 741 >> BDC BT 1 0 0 -1 51.09799957 26.98600006 Tm [( )] TJ ET EMC /P <</MCID 742 >> BDC BT 1 0 0 -1 53.59799957 26.98600006 Tm [(made)] TJ ET EMC /P <</MCID 743 >> BDC BT 1 0 0 -1 75.25299835 26.98600006 Tm [( )] TJ ET EMC /P <</MCID 744 >> BDC BT 1 0 0 -1 77.75299835 26.98600006 Tm [(by)] TJ ET EMC /P <</MCID 745 >> BDC BT 1 0 0 -1 87.75299835 26.98600006 Tm [( )] TJ ET EMC /P <</MCID 746 >> BDC BT 1 0 0 -1 90.25299835 26.98600006 Tm [(welcome银河国际网站)] TJ ET EMC /P <</MCID 747 >> BDC BT 1 0 0 -1 113.03600311 26.98600006 Tm [( )] TJ ET EMC /P <</MCID 748 >> BDC BT 1 0 0 -1 115.53600311 26.98600006 Tm [(Research,)] TJ ET EMC /P <</MCID 749 >> BDC BT 1 0 0 -1 154.68200684 26.98600006 Tm [( )] TJ ET EMC /P <</MCID 750 >> BDC BT 1 0 0 -1 157.18200684 26.98600006 Tm [(Inc.)] TJ ET EMC /P <</MCID 751 >> BDC BT 1 0 0 -1 172.45100403 26.98600006 Tm [( )] TJ ET EMC /P <</MCID 752 >> BDC BT 1 0 0 -1 174.95100403 26.98600006 Tm [(This)] TJ ET EMC /P <</MCID 753 >> BDC BT 1 0 0 -1 192.72900391 26.98600006 Tm [( )] TJ ET EMC /P <</MCID 754 >> BDC BT 1 0 0 -1 195.22900391 26.98600006 Tm [(product)] TJ ET EMC /P <</MCID 755 >> BDC BT 1 0 0 -1 225.77600098 26.98600006 Tm [( )] TJ ET EMC /P <</MCID 756 >> BDC BT 1 0 0 -1 0 42.58599854 Tm [(has)] TJ ET EMC /P <</MCID 757 >> BDC BT 1 0 0 -1 13.32999992 42.58599854 Tm [( )] TJ ET EMC /P <</MCID 758 >> BDC BT 1 0 0 -1 15.82999992 42.58599854 Tm [(8)] TJ ET EMC /P <</MCID 759 >> BDC BT 1 0 0 -1 20.82999992 42.58599854 Tm [( )] TJ ET EMC /P <</MCID 760 >> BDC BT 1 0 0 -1 23.32999992 42.58599854 Tm [(chambe)1(rs)] TJ ET EMC /P <</MCID 761 >> BDC BT 1 0 0 -1 61.64500046 42.58599854 Tm [( )] TJ ET EMC /P <</MCID 762 >> BDC BT 1 0 0 -1 64.14499664 42.58599854 Tm [(and)] TJ ET EMC /P <</MCID 763 >> BDC BT 1 0 0 -1 78.58300018 42.58599854 Tm [( )] TJ ET EMC /P <</MCID 764 >> BDC BT 1 0 0 -1 81.08300018 42.58599854 Tm [(each)] TJ ET EMC /P <</MCID 765 >> BDC BT 1 0 0 -1 99.39800262 42.58599854 Tm [( )] TJ ET EMC /P <</MCID 766 >> BDC BT 1 0 0 -1 101.89800262 42.58599854 Tm [(chambe)1(r)] TJ ET EMC /P <</MCID 767 >> BDC BT 1 0 0 -1 136.32200623 42.58599854 Tm [( )] TJ ET EMC /P <</MCID 768 >> BDC BT 1 0 0 -1 138.82200623 42.58599854 Tm [(is)] TJ ET EMC /P <</MCID 769 >> BDC BT 1 0 0 -1 145.49200439 42.58599854 Tm [( )] TJ ET EMC /P <</MCID 770 >> BDC BT 1 0 0 -1 147.99200439 42.58599854 Tm [(configured)] TJ ET EMC /P <</MCID 771 >> BDC BT 1 0 0 -1 191.30700684 42.58599854 Tm [( )] TJ ET EMC /P <</MCID 772 >> BDC BT 1 0 0 -1 193.80700684 42.58599854 Tm [(with)] TJ ET EMC /P <</MCID 773 >> BDC BT 1 0 0 -1 211.58500671 42.58599854 Tm [( )] TJ ET EMC /P <</MCID 774 >> BDC BT 1 0 0 -1 0 58.18599701 Tm [(four)] TJ ET EMC /P <</MCID 775 >> BDC BT 1 0 0 -1 16.65999985 58.18599701 Tm [( )] TJ ET EMC /P <</MCID 776 >> BDC BT 1 0 0 -1 19.15999985 58.18599701 Tm [(chemi)1(cals)] TJ ET EMC /P <</MCID 777 >> BDC BT 1 0 0 -1 59.13999939 58.18599701 Tm [( )] TJ ET EMC /P <</MCID 778 >> BDC BT 1 0 0 -1 61.63999939 58.18599701 Tm [(-)] TJ ET EMC /P <</MCID 779 >> BDC BT 1 0 0 -1 64.97000122 58.18599701 Tm [( )] TJ ET EMC /P <</MCID 780 >> BDC BT 1 0 0 -1 67.47000122 58.18599701 Tm [(Main)] TJ ET EMC /P <</MCID 781 >> BDC BT 1 0 0 -1 88.57800293 58.18599701 Tm [( )] TJ ET EMC /P <</MCID 782 >> BDC BT 1 0 0 -1 91.07800293 58.18599701 Tm [(chemi)1(cal)] TJ ET EMC /P <</MCID 783 >> BDC BT 1 0 0 -1 127.16699982 58.18599701 Tm [( )] TJ ET EMC /P <</MCID 784 >> BDC BT 1 0 0 -1 129.66700745 58.18599701 Tm [(\(ST250)] TJ ET EMC /P <</MCID 785 >> BDC BT 1 0 0 -1 159.66700745 58.18599701 Tm [( )] TJ ET EMC /P <</MCID 786 >> BDC BT 1 0 0 -1 162.16700745 58.18599701 Tm [(or)] TJ ET EMC /P <</MCID 787 >> BDC BT 1 0 0 -1 170.49699402 58.18599701 Tm [( )] TJ ET EMC /P <</MCID 788 >> BDC BT 1 0 0 -1 172.99699402 58.18599701 Tm [(ICS8000\),)] TJ ET EMC /P <</MCID 789 >> BDC BT 1 0 0 -1 214.38900757 58.18599701 Tm [( )] TJ ET EMC /P <</MCID 790 >> BDC BT 1 0 0 -1 0 73.78600311 Tm [(DHF,)] TJ ET EMC /P <</MCID 791 >> BDC BT 1 0 0 -1 22.50499916 73.78600311 Tm [( )] TJ ET EMC /P <</MCID 792 >> BDC BT 1 0 0 -1 25.00499916 73.78600311 Tm [(dual)] TJ ET EMC /P <</MCID 793 >> BDC BT 1 0 0 -1 42.22200012 73.78600311 Tm [( )] TJ ET EMC /P <</MCID 794 >> BDC BT 1 0 0 -1 44.72200012 73.78600311 Tm [(fluid)] TJ ET EMC /P <</MCID 795 >> BDC BT 1 0 0 -1 63.60900116 73.78600311 Tm [( )] TJ ET EMC /P <</MCID 796 >> BDC BT 1 0 0 -1 66.10900116 73.78600311 Tm [(spray)] TJ ET EMC /P <</MCID 797 >> BDC BT 1 0 0 -1 87.76899719 73.78600311 Tm [( )] TJ ET EMC /P <</MCID 798 >> BDC BT 1 0 0 -1 90.26899719 73.78600311 Tm [(and)] TJ ET EMC /P <</MCID 799 >> BDC BT 1 0 0 -1 104.70700073 73.78600311 Tm [( )] TJ ET EMC /P <</MCID 800 >> BDC BT 1 0 0 -1 107.20700073 73.78600311 Tm [(CO)] TJ ET EMC /P <</MCID 801 >> BDC BT /FAAABG 6.5 Tf 1 0 0 -1 121.09899902 75.28600311 Tm [(2)] TJ ET EMC /P <</MCID 802 >> BDC BT /FAAABG 10 Tf 1 0 0 -1 124.34899902 73.78600311 Tm [( )] TJ ET EMC /P <</MCID 803 >> BDC BT 1 0 0 -1 126.84899902 73.78600311 Tm [(gasified)] TJ ET EMC /P <</MCID 804 >> BDC BT 1 0 0 -1 158.5039978 73.78600311 Tm [( )] TJ ET EMC /P <</MCID 805 >> BDC BT 1 0 0 -1 161.0039978 73.78600311 Tm [(DI)] TJ ET EMC /P <</MCID 806 >> BDC BT 1 0 0 -1 171.55599976 73.78600311 Tm [( )] TJ ET EMC /P <</MCID 807 >> BDC BT 1 0 0 -1 174.05599976 73.78600311 Tm [(water.)] TJ ET EMC /P <</MCID 808 >> BDC BT 1 0 0 -1 198.76300049 73.78600311 Tm [( )] TJ ET EMC /P <</MCID 809 >> BDC BT 1 0 0 -1 201.26300049 73.78600311 Tm [(Two)] TJ ET EMC /P <</MCID 810 >> BDC BT 1 0 0 -1 219.59300232 73.78600311 Tm [( )] TJ ET EMC /P <</MCID 811 >> BDC BT 1 0 0 -1 0 89.38600159 Tm [(kinds)] TJ ET EMC /P <</MCID 812 >> BDC BT 1 0 0 -1 21.67000008 89.38600159 Tm [( )] TJ ET EMC /P <</MCID 813 >> BDC BT 1 0 0 -1 24.17000008 89.38600159 Tm [(of)] TJ ET EMC /P <</MCID 814 >> BDC BT 1 0 0 -1 32.5 89.38600159 Tm [( )] TJ ET EMC /P <</MCID 815 >> BDC BT 1 0 0 -1 35 89.38600159 Tm [(post-etch)] TJ ET EMC /P <</MCID 816 >> BDC BT 1 0 0 -1 71.65499878 89.38600159 Tm [( )] TJ ET EMC /P <</MCID 817 >> BDC BT 1 0 0 -1 74.15499878 89.38600159 Tm [(clea)1(n)] TJ ET EMC /P <</MCID 818 >> BDC BT 1 0 0 -1 95.24900055 89.38600159 Tm [( )] TJ ET EMC /P <</MCID 819 >> BDC BT 1 0 0 -1 97.74900055 89.38600159 Tm [(chemi)1(cals)] TJ ET EMC /P <</MCID 820 >> BDC BT 1 0 0 -1 137.72900391 89.38600159 Tm [( )] TJ ET EMC /P <</MCID 821 >> BDC BT 1 0 0 -1 140.22900391 89.38600159 Tm [(\(ST250)] TJ ET EMC /P <</MCID 822 >> BDC BT 1 0 0 -1 170.22900391 89.38600159 Tm [( )] TJ ET EMC /P <</MCID 823 >> BDC BT 1 0 0 -1 172.72900391 89.38600159 Tm [(and)] TJ ET EMC /P <</MCID 824 >> BDC BT 1 0 0 -1 187.16700745 89.38600159 Tm [( )] TJ ET EMC /P <</MCID 825 >> BDC BT 1 0 0 -1 189.66700745 89.38600159 Tm [(ICS8000\))] TJ ET EMC /P <</MCID 826 >> BDC BT 1 0 0 -1 228.55900574 89.38600159 Tm [( )] TJ ET EMC /P <</MCID 827 >> BDC BT 1 0 0 -1 0 104.98600006 Tm [(are)] TJ ET EMC /P <</MCID 828 >> BDC BT 1 0 0 -1 12.20699978 104.98600006 Tm [( )] TJ ET EMC /P <</MCID 829 >> BDC BT 1 0 0 -1 14.70699978 104.98600006 Tm [(tested)] TJ ET EMC /P <</MCID 830 >> BDC BT 1 0 0 -1 38.0320015 104.98600006 Tm [( )] TJ ET EMC /P <</MCID 831 >> BDC BT 1 0 0 -1 40.5320015 104.98600006 Tm [(and)] TJ ET EMC /P <</MCID 832 >> BDC BT 1 0 0 -1 54.97000122 104.98600006 Tm [( )] TJ ET EMC /P <</MCID 833 >> BDC BT 1 0 0 -1 57.47000122 104.98600006 Tm [(discussed)] TJ ET EMC /P <</MCID 834 >> BDC BT 1 0 0 -1 95.80000305 104.98600006 Tm [( )] TJ ET EMC /P <</MCID 835 >> BDC BT 1 0 0 -1 98.30000305 104.98600006 Tm [(in)] TJ ET EMC /P <</MCID 836 >> BDC BT 1 0 0 -1 106.07800293 104.98600006 Tm [( )] TJ ET EMC /P <</MCID 837 >> BDC BT 1 0 0 -1 108.57800293 104.98600006 Tm [(this)] TJ ET EMC /P <</MCID 838 >> BDC BT 1 0 0 -1 123.02600098 104.98600006 Tm [( )] TJ ET EMC /P <</MCID 839 >> BDC BT 1 0 0 -1 125.52600098 104.98600006 Tm [(artic)1(le.)] TJ ET EMC /P <</MCID 840 >> BDC BT 1 0 0 -1 153.0059967 104.98600006 Tm [( )] TJ ET EMC /P <</MCID 841 >> BDC BT 1 0 0 -1 155.5059967 104.98600006 Tm [(Both)] TJ ET EMC /P <</MCID 842 >> BDC BT 1 0 0 -1 174.95399475 104.98600006 Tm [( )] TJ ET EMC /P <</MCID 843 >> BDC BT 1 0 0 -1 177.45399475 104.98600006 Tm [(ST250)] TJ ET EMC /P <</MCID 844 >> BDC BT 1 0 0 -1 204.12399292 104.98600006 Tm [( )] TJ ET EMC /P <</MCID 845 >> BDC BT 1 0 0 -1 206.62399292 104.98600006 Tm [(and)] TJ ET EMC /P <</MCID 846 >> BDC BT 1 0 0 -1 221.06199646 104.98600006 Tm [( )] TJ ET EMC /P <</MCID 847 >> BDC BT 1 0 0 -1 0 120.58599854 Tm [(ICS8000)] TJ ET EMC /P <</MCID 848 >> BDC BT 1 0 0 -1 35.56200027 120.58599854 Tm [( )] TJ ET EMC /P <</MCID 849 >> BDC BT 1 0 0 -1 38.06200027 120.58599854 Tm [(are)] TJ ET EMC /P <</MCID 850 >> BDC BT 1 0 0 -1 50.26900101 120.58599854 Tm [( )] TJ ET EMC /P <</MCID 851 >> BDC BT 1 0 0 -1 52.76900101 120.58599854 Tm [(fluorine-ba)1(s)-1(e)1(d)] TJ ET EMC /P <</MCID 852 >> BDC BT 1 0 0 -1 110.52300262 120.58599854 Tm [( )] TJ ET EMC /P <</MCID 853 >> BDC BT 1 0 0 -1 113.02300262 120.58599854 Tm [(semi-aque)1(ous)] TJ ET EMC /P <</MCID 854 >> BDC BT 1 0 0 -1 168.00799561 120.58599854 Tm [( )] TJ ET EMC /P <</MCID 855 >> BDC BT 1 0 0 -1 170.50799561 120.58599854 Tm [(strippers)] TJ ET EMC /P <</MCID 856 >> BDC BT 1 0 0 -1 204.94599915 120.58599854 Tm [( )] TJ ET EMC /P <</MCID 857 >> BDC BT 1 0 0 -1 207.44599915 120.58599854 Tm [(and)] TJ ET EMC /P <</MCID 858 >> BDC BT 1 0 0 -1 221.88400269 120.58599854 Tm [( )] TJ ET EMC /P <</MCID 859 >> BDC BT 1 0 0 -1 0 136.18600464 Tm [(designed)] TJ ET EMC /P <</MCID 860 >> BDC BT 1 0 0 -1 35.54700089 136.18600464 Tm [( )] TJ ET EMC /P <</MCID 861 >> BDC BT 1 0 0 -1 38.04700089 136.18600464 Tm [(for)] TJ ET EMC /P <</MCID 862 >> BDC BT 1 0 0 -1 49.70700073 136.18600464 Tm [( )] TJ ET EMC /P <</MCID 863 >> BDC BT 1 0 0 -1 52.20700073 136.18600464 Tm [(Cu)] TJ ET EMC /P <</MCID 864 >> BDC BT 1 0 0 -1 63.8769989 136.18600464 Tm [( )] TJ ET EMC /P <</MCID 865 >> BDC BT 1 0 0 -1 66.3769989 136.18600464 Tm [(damasce)1(ne)] TJ ET EMC /P <</MCID 866 >> BDC BT 1 0 0 -1 110.23899841 136.18600464 Tm [( )] TJ ET EMC /P <</MCID 867 >> BDC BT 1 0 0 -1 112.73899841 136.18600464 Tm [(clea)1(ning.)] TJ ET EMC /P <</MCID 868 >> BDC BT 1 0 0 -1 149.11099243 136.18600464 Tm [( )] TJ ET EMC /P <</MCID 869 >> BDC BT 1 0 0 -1 151.61099243 136.18600464 Tm [(However,)] TJ ET EMC /P <</MCID 870 >> BDC BT 1 0 0 -1 190.76100159 136.18600464 Tm [( )] TJ ET EMC /P <</MCID 871 >> BDC BT 1 0 0 -1 193.26100159 136.18600464 Tm [(as)] TJ ET EMC /P <</MCID 872 >> BDC BT 1 0 0 -1 201.59100342 136.18600464 Tm [( )] TJ ET EMC /P <</MCID 873 >> BDC BT 1 0 0 -1 204.09100342 136.18600464 Tm [(shown)] TJ ET EMC /P <</MCID 874 >> BDC BT 1 0 0 -1 230.20399475 136.18600464 Tm [( )] TJ ET EMC /P <</MCID 875 >> BDC BT 1 0 0 -1 0 151.78599548 Tm [(in)] TJ ET EMC /P <</MCID 876 >> BDC BT 1 0 0 -1 7.77799988 151.78599548 Tm [( )] TJ ET EMC /P <</MCID 877 >> BDC BT 1 0 0 -1 10.27799988 151.78599548 Tm [(Table)] TJ ET EMC /P <</MCID 878 >> BDC BT 1 0 0 -1 33.04199982 151.78599548 Tm [( )] TJ ET EMC /P <</MCID 879 >> BDC BT 1 0 0 -1 35.54199982 151.78599548 Tm [(1,)] TJ ET EMC /P <</MCID 880 >> BDC BT 1 0 0 -1 43.04199982 151.78599548 Tm [( )] TJ ET EMC /P <</MCID 881 >> BDC BT 1 0 0 -1 45.54199982 151.78599548 Tm [(ICS8000)] TJ ET EMC /P <</MCID 882 >> BDC BT 1 0 0 -1 81.10399628 151.78599548 Tm [( )] TJ ET EMC /P <</MCID 883 >> BDC BT 1 0 0 -1 83.60399628 151.78599548 Tm [(feature)1(s)] TJ ET EMC /P <</MCID 884 >> BDC BT 1 0 0 -1 115.25 151.78599548 Tm [( )] TJ ET EMC /P <</MCID 885 >> BDC BT 1 0 0 -1 117.75 151.78599548 Tm [(lower)] TJ ET EMC /P <</MCID 886 >> BDC BT 1 0 0 -1 140.51899719 151.78599548 Tm [( )] TJ ET EMC /P <</MCID 887 >> BDC BT 1 0 0 -1 143.01899719 151.78599548 Tm [(viscosity)] TJ ET EMC /P <</MCID 888 >> BDC BT 1 0 0 -1 178.57600403 151.78599548 Tm [( )] TJ ET EMC /P <</MCID 889 >> BDC BT 1 0 0 -1 181.07600403 151.78599548 Tm [(compare)1(d)] TJ ET EMC /P <</MCID 890 >> BDC BT 1 0 0 -1 220.5 151.78599548 Tm [( )] TJ ET EMC /P <</MCID 891 >> BDC BT 1 0 0 -1 0 167.47200012 Tm [(with)] TJ ET EMC /P <</MCID 892 >> BDC BT 1 0 0 -1 17.77799988 167.47200012 Tm [( )] TJ ET EMC /P <</MCID 893 >> BDC BT 1 0 0 -1 20.27799988 167.47200012 Tm [(ST250)] TJ ET EMC /P <</MCID 894 >> BDC BT 1 0 0 -1 46.94800186 167.47200012 Tm [( )] TJ ET EMC /P <</MCID 895 >> BDC BT 1 0 0 -1 49.44800186 167.47200012 Tm [(both)] TJ ET EMC /P <</MCID 896 >> BDC BT 1 0 0 -1 67.22599792 167.47200012 Tm [( )] TJ ET EMC /P <</MCID 897 >> BDC BT 1 0 0 -1 69.72599792 167.47200012 Tm [(at)] TJ ET EMC /P <</MCID 898 >> BDC BT 1 0 0 -1 76.94300079 167.47200012 Tm [( )] TJ ET EMC /P <</MCID 899 >> BDC BT 1 0 0 -1 79.44300079 167.47200012 Tm [(room)] TJ ET EMC /P <</MCID 900 >> BDC BT 1 0 0 -1 100.5510025 167.47200012 Tm [( )] TJ ET EMC /P <</MCID 901 >> BDC BT 1 0 0 -1 103.0510025 167.47200012 Tm [(tempe)1(rature)] TJ ET EMC /P <</MCID 902 >> BDC BT 1 0 0 -1 150.80000305 167.47200012 Tm [( )] TJ ET EMC /P <</MCID 903 >> BDC BT 1 0 0 -1 153.30000305 167.47200012 Tm [(and)] TJ ET EMC /P <</MCID 904 >> BDC BT 1 0 0 -1 167.73800659 167.47200012 Tm [( )] TJ ET EMC /P <</MCID 905 >> BDC BT 1 0 0 -1 170.23800659 167.47200012 Tm [(40)] TJ ET EMC /P <</Lang (zh-CN) /MCID 906 >> BDC BT /FAAAFA 10 Tf 1 0 0 -1 180.23800659 167.47200012 Tm [<0003>] TJ ET EMC /P <</MCID 907 >> BDC BT /FAAAFE 10 Tf 1 0 0 -1 190.23800659 167.47200012 Tm [( )] TJ ET EMC /P <</MCID 908 >> BDC BT /FAAABG 10 Tf 1 0 0 -1 195.23800659 167.47200012 Tm [(which)] TJ ET EMC /P <</MCID 909 >> BDC BT 1 0 0 -1 219.67599487 167.47200012 Tm [( )] TJ ET EMC /P <</MCID 910 >> BDC BT 1 0 0 -1 222.17599487 167.47200012 Tm [(is)] TJ ET EMC /P <</MCID 911 >> BDC BT 1 0 0 -1 228.84599304 167.47200012 Tm [( )] TJ ET EMC /P <</MCID 912 >> BDC BT 1 0 0 -1 0 182.98600769 Tm [(the)] TJ ET EMC /P <</MCID 913 >> BDC BT 1 0 0 -1 12.21700001 182.98600769 Tm [( )] TJ ET EMC /P <</MCID 914 >> BDC BT 1 0 0 -1 14.71700001 182.98600769 Tm [(typica)1(l)] TJ ET EMC /P <</MCID 915 >> BDC BT 1 0 0 -1 41.92900085 182.98600769 Tm [( )] TJ ET EMC /P <</MCID 916 >> BDC BT 1 0 0 -1 44.42900085 182.98600769 Tm [(process)] TJ ET EMC /P <</MCID 917 >> BDC BT 1 0 0 -1 74.41899872 182.98600769 Tm [( )] TJ ET EMC /P <</MCID 918 >> BDC BT 1 0 0 -1 76.91899872 182.98600769 Tm [(tempe)1(rature.)] TJ ET EMC /P <</MCID 919 >> BDC BT 1 0 0 -1 127.16799927 182.98600769 Tm [( )] TJ ET EMC /P <</MCID 920 >> BDC BT 1 0 0 -1 129.66799927 182.98600769 Tm [(It)] TJ ET EMC /P <</MCID 921 >> BDC BT 1 0 0 -1 135.77600098 182.98600769 Tm [( )] TJ ET EMC /P <</MCID 922 >> BDC BT 1 0 0 -1 138.27600098 182.98600769 Tm [(is)] TJ ET EMC /P <</MCID 923 >> BDC BT 1 0 0 -1 144.94599915 182.98600769 Tm [( )] TJ ET EMC /P <</MCID 924 >> BDC BT 1 0 0 -1 147.44599915 182.98600769 Tm [(expect)1(ed)] TJ ET EMC /P <</MCID 925 >> BDC BT 1 0 0 -1 182.97799683 182.98600769 Tm [( )] TJ ET EMC /P <</MCID 926 >> BDC BT 1 0 0 -1 185.47799683 182.98600769 Tm [(that)] TJ ET EMC /P <</MCID 927 >> BDC BT 1 0 0 -1 200.4730072 182.98600769 Tm [( )] TJ ET EMC /P <</MCID 928 >> BDC BT 1 0 0 -1 0 198.58599854 Tm [(ICS8000)] TJ ET EMC /P <</MCID 929 >> BDC BT 1 0 0 -1 35.56200027 198.58599854 Tm [( )] TJ ET EMC /P <</MCID 930 >> BDC BT 1 0 0 -1 38.06200027 198.58599854 Tm [(can)] TJ ET EMC /P <</MCID 931 >> BDC BT 1 0 0 -1 51.93899918 198.58599854 Tm [( )] TJ ET EMC /P <</MCID 932 >> BDC BT 1 0 0 -1 54.43899918 198.58599854 Tm [(be)] TJ ET EMC /P <</MCID 933 >> BDC BT 1 0 0 -1 63.8769989 198.58599854 Tm [( )] TJ ET EMC /P <</MCID 934 >> BDC BT 1 0 0 -1 66.3769989 198.58599854 Tm [(rinsed)] TJ ET EMC /P <</MCID 935 >> BDC BT 1 0 0 -1 90.81500244 198.58599854 Tm [( )] TJ ET EMC /P <</MCID 936 >> BDC BT 1 0 0 -1 93.31500244 198.58599854 Tm [(off)] TJ ET EMC /P <</MCID 937 >> BDC BT 1 0 0 -1 104.97499847 198.58599854 Tm [( )] TJ ET EMC /P <</MCID 938 >> BDC BT 1 0 0 -1 107.47499847 198.58599854 Tm [(by)] TJ ET EMC /P <</MCID 939 >> BDC BT 1 0 0 -1 117.47499847 198.58599854 Tm [( )] TJ ET EMC /P <</MCID 940 >> BDC BT 1 0 0 -1 119.97499847 198.58599854 Tm [(ultrapure)] TJ ET EMC /P <</MCID 941 >> BDC BT 1 0 0 -1 156.06900024 198.58599854 Tm [( )] TJ ET EMC /P <</MCID 942 >> BDC BT 1 0 0 -1 158.56900024 198.58599854 Tm [(water)] TJ ET EMC /P <</MCID 943 >> BDC BT 1 0 0 -1 180.77600098 198.58599854 Tm [( )] TJ ET EMC /P <</MCID 944 >> BDC BT 1 0 0 -1 183.27600098 198.58599854 Tm [(more)] TJ ET EMC /P <</MCID 945 >> BDC BT 1 0 0 -1 203.82299805 198.58599854 Tm [( )] TJ ET EMC /P <</MCID 946 >> BDC BT 1 0 0 -1 0 214.18600464 Tm [(effici)1(ently)] TJ ET EMC /P <</MCID 947 >> BDC BT 1 0 0 -1 41.0890007 214.18600464 Tm [( )] TJ ET EMC /P <</MCID 948 >> BDC BT 1 0 0 -1 43.5890007 214.18600464 Tm [(compare)1(d)] TJ ET EMC /P <</MCID 949 >> BDC BT 1 0 0 -1 83.01300049 214.18600464 Tm [( )] TJ ET EMC /P <</MCID 950 >> BDC BT 1 0 0 -1 85.51300049 214.18600464 Tm [(with)] TJ ET EMC /P <</MCID 951 >> BDC BT 1 0 0 -1 103.29100037 214.18600464 Tm [( )] TJ ET EMC /P <</MCID 952 >> BDC BT 1 0 0 -1 105.79100037 214.18600464 Tm [(the)] TJ ET EMC /P <</MCID 953 >> BDC BT 1 0 0 -1 118.00800323 214.18600464 Tm [( )] TJ ET EMC /P <</MCID 954 >> BDC BT 1 0 0 -1 120.50800323 214.18600464 Tm [(viscous)] TJ ET EMC /P <</MCID 955 >> BDC BT 1 0 0 -1 150.50799561 214.18600464 Tm [( )] TJ ET EMC /P <</MCID 956 >> BDC BT 1 0 0 -1 153.00799561 214.18600464 Tm [(ST250,)] TJ ET EMC /P <</MCID 957 >> BDC BT 1 0 0 -1 182.17799377 214.18600464 Tm [( )] TJ ET EMC /P <</MCID 958 >> BDC BT 1 0 0 -1 184.67799377 214.18600464 Tm [(which)] TJ ET EMC /P <</MCID 959 >> BDC BT 1 0 0 -1 209.11599731 214.18600464 Tm [( )] TJ ET EMC /P <</MCID 960 >> BDC BT 1 0 0 -1 211.61599731 214.18600464 Tm [(may)] TJ ET EMC /P <</MCID 961 >> BDC BT 1 0 0 -1 228.83299255 214.18600464 Tm [( )] TJ ET EMC /P <</MCID 962 >> BDC BT 1 0 0 -1 0 229.78599548 Tm [(contribut)1(e)] TJ ET EMC /P <</MCID 963 >> BDC BT 1 0 0 -1 40.54199982 229.78599548 Tm [( )] TJ ET EMC /P <</MCID 964 >> BDC BT 1 0 0 -1 43.04199982 229.78599548 Tm [(to)] TJ ET EMC /P <</MCID 965 >> BDC BT 1 0 0 -1 50.81999969 229.78599548 Tm [( )] TJ ET EMC /P <</MCID 966 >> BDC BT 1 0 0 -1 53.31999969 229.78599548 Tm [(shorter)] TJ ET EMC /P <</MCID 967 >> BDC BT 1 0 0 -1 81.08899689 229.78599548 Tm [( )] TJ ET EMC /P <</MCID 968 >> BDC BT 1 0 0 -1 83.58899689 229.78599548 Tm [(rinse)] TJ ET EMC /P <</MCID 969 >> BDC BT 1 0 0 -1 103.02700043 229.78599548 Tm [( )] TJ ET EMC /P <</MCID 970 >> BDC BT 1 0 0 -1 105.52700043 229.78599548 Tm [(tim)1(e)] TJ ET EMC /P <</MCID 971 >> BDC BT 1 0 0 -1 123.30000305 229.78599548 Tm [( )] TJ ET EMC /P <</MCID 972 >> BDC BT 1 0 0 -1 125.80000305 229.78599548 Tm [(and)] TJ ET EMC /P <</MCID 973 >> BDC BT 1 0 0 -1 140.23800659 229.78599548 Tm [( )] TJ ET EMC /P <</MCID 974 >> BDC BT 1 0 0 -1 142.73800659 229.78599548 Tm [(bette)1(r)] TJ ET EMC /P <</MCID 975 >> BDC BT 1 0 0 -1 165.5019989 229.78599548 Tm [( )] TJ ET EMC /P <</MCID 976 >> BDC BT 1 0 0 -1 168.0019989 229.78599548 Tm [(partic)1(le)] TJ ET EMC /P <</MCID 977 >> BDC BT 1 0 0 -1 197.98199463 229.78599548 Tm [( )] TJ ET EMC /P <</MCID 978 >> BDC BT 1 0 0 -1 0 245.38600159 Tm [(performanc)1(e.)] TJ ET EMC /P <</MCID 979 >> BDC BT 1 0 0 -1 53.02199936 245.38600159 Tm /GS21 gs 0 g [( )] TJ ET EMC Q q 1 0 0 1 0 265.20001221 cm /P <</MCID 980 >> BDC BT 1 0 0 -1 0 11.38599968 Tm [( )] TJ ET EMC Q q 1 0 0 1 0 280.79998779 cm /P <</MCID 981 >> BDC BT 1 0 0 -1 0 11.38599968 Tm /GS22 gs 0 g [(Table)] TJ ET EMC /P <</MCID 982 >> BDC BT 1 0 0 -1 22.76399994 11.38599968 Tm [( )] TJ ET EMC /P <</MCID 983 >> BDC BT 1 0 0 -1 29.63100052 11.38599968 Tm [(1.)] TJ ET EMC /P <</MCID 984 >> BDC BT 1 0 0 -1 37.13100052 11.38599968 Tm [( )] TJ ET EMC /P <</MCID 985 >> BDC BT 1 0 0 -1 43.9980011 11.38599968 Tm [(Viscosity)] TJ ET EMC /P <</MCID 986 >> BDC BT 1 0 0 -1 81.77600098 11.38599968 Tm [( )] TJ ET EMC /P <</MCID 987 >> BDC BT 1 0 0 -1 88.64299774 11.38599968 Tm [(compari)1(s)-1(on)] TJ ET EMC /P <</MCID 988 >> BDC BT 1 0 0 -1 135.29800415 11.38599968 Tm [( )] TJ ET EMC /P <</MCID 989 >> BDC BT 1 0 0 -1 142.16499329 11.38599968 Tm [(between)] TJ ET EMC /P <</MCID 990 >> BDC BT 1 0 0 -1 175.47999573 11.38599968 Tm [( )] TJ ET EMC /P <</MCID 991 >> BDC BT 1 0 0 -1 182.34700012 11.38599968 Tm [(ST250)] TJ ET EMC /P <</MCID 992 >> BDC BT 1 0 0 -1 209.01699829 11.38599968 Tm [( )] TJ ET EMC /P <</MCID 993 >> BDC BT 1 0 0 -1 215.88400269 11.38599968 Tm [(and)] TJ ET EMC /P <</MCID 994 >> BDC BT 1 0 0 -1 230.32200623 11.38599968 Tm [( )] TJ ET EMC /P <</MCID 995 >> BDC BT 1 0 0 -1 0 26.98600006 Tm [(ICS8000)] TJ ET EMC /P <</MCID 996 >> BDC BT 1 0 0 -1 35.56200027 26.98600006 Tm /GS23 gs 0 g [( )] TJ ET EMC Q q 1 0 0 1 -2.38700008 312 cm q -1 0 m 128.55000305 0 l 128.55000305 17.60000038 l -1 17.60000038 l h W n q 1 0 0 1 5.4000001 1 cm /P <</MCID 997 >> BDC BT 1 0 0 -1 58.375 11.38599968 Tm [( )] TJ ET EMC Q Q q 1 0 0 1 127.55000305 0 cm -1 0 m 50.59999847 0 l 50.59999847 17.60000038 l -1 17.60000038 l h W n q 1 0 0 1 5.4000001 1 cm /P <</MCID 998 >> BDC BT /FAAAAH 10 Tf 1 0 0 -1 5.78399992 11.38599968 Tm /GS24 gs 0 g [(ST250)] TJ ET EMC /P <</MCID 999 >> BDC BT /FAAABG 10 Tf 1 0 0 -1 33.01499939 11.38599968 Tm /GS25 gs 0 g [( )] TJ ET EMC Q Q q 1 0 0 1 177.1499939 0 cm -1 0 m 58.95000076 0 l 58.95000076 17.60000038 l -1 17.60000038 l h W n q 1 0 0 1 5.4000001 1 cm /P <</MCID 1000 >> BDC BT /FAAAAH 10 Tf 1 0 0 -1 5.23699999 11.38599968 Tm /GS26 gs 0 g [(ICS8000)] TJ ET EMC /P <</MCID 1001 >> BDC BT /FAAABG 10 Tf 1 0 0 -1 41.91199875 11.38599968 Tm /GS27 gs 0 g [( )] TJ ET EMC Q Q q 1 0 0 1 0 16.60000038 cm q -1 -1 m 128.55000305 -1 l 128.55000305 19 l -1 19 l h W n q 1 0 0 1 5.4000001 1 cm /P <</MCID 1002 >> BDC BT /FAAAAH 10 Tf 1 0 0 -1 3.34699988 11.47200012 Tm /GS28 gs 0 g [(Viscosity)] TJ ET EMC /P <</MCID 1003 >> BDC BT 1 0 0 -1 41.67699814 11.47200012 Tm [( )] TJ ET EMC /P <</MCID 1004 >> BDC BT 1 0 0 -1 44.17699814 11.47200012 Tm [(at)] TJ ET EMC /P <</MCID 1005 >> BDC BT 1 0 0 -1 52.50699997 11.47200012 Tm [( )] TJ ET EMC /P <</MCID 1006 >> BDC BT 1 0 0 -1 55.00699997 11.47200012 Tm [(25)] TJ ET EMC /P <</Lang (zh-CN) /MCID 1007 >> BDC BT /FAAAGE 10 Tf 1 0 0 -1 65.00700378 11.47200012 Tm 2 Tr 0.2857143 w 0 G [<0003>] TJ ET EMC /P <</MCID 1008 >> BDC BT /FAAAAH 10 Tf 1 0 0 -1 75.07700348 11.47200012 Tm 0 Tr [( )] TJ ET EMC /P <</MCID 1009 >> BDC BT 1 0 0 -1 80.07700348 11.47200012 Tm [(\(mPa)] TJ ET EMC /P <</Lang (zh-CN) /MCID 1010 >> BDC BT 1 0 0 -1 102.84600067 11.47200012 Tm [(?] TJ ET EMC /P <</MCID 1011 >> BDC BT 1 0 0 -1 106.18099976 11.47200012 Tm [(s\))] TJ ET EMC /P <</MCID 1012 >> BDC BT /FAAABG 10 Tf 1 0 0 -1 113.40299988 11.47200012 Tm /GS29 gs 0 g [( )] TJ ET EMC Q Q q 1 0 0 1 127.55000305 0 cm -1 -1 m 50.59999847 -1 l 50.59999847 19 l -1 19 l h W n q 1 0 0 1 5.4000001 1 cm /P <</MCID 1013 >> BDC BT 1 0 0 -1 8.14999962 12.08599949 Tm /GS30 gs 0 g [(33.14)] TJ ET EMC /P <</MCID 1014 >> BDC BT 1 0 0 -1 30.64999962 12.08599949 Tm /GS31 gs 0 g [( )] TJ ET EMC Q Q q 1 0 0 1 177.1499939 0 cm -1 -1 m 58.95000076 -1 l 58.95000076 19 l -1 19 l h W n q 1 0 0 1 5.4000001 1 cm /P <</MCID 1015 >> BDC BT 1 0 0 -1 14.82499981 12.08599949 Tm /GS32 gs 0 g [(8.75)] TJ ET EMC /P <</MCID 1016 >> BDC BT 1 0 0 -1 32.32500076 12.08599949 Tm /GS33 gs 0 g [( )] TJ ET EMC Q Q Q q 1 0 0 1 0 34.59999847 cm q -1 -1 m 128.55000305 -1 l 128.55000305 16.60000038 l -1 16.60000038 l h W n q 1 0 0 1 5.4000001 0 cm /P <</MCID 1017 >> BDC BT /FAAAAH 10 Tf 1 0 0 -1 3.34699988 11.47200012 Tm /GS34 gs 0 g [(Viscosity)] TJ ET EMC /P <</MCID 1018 >> BDC BT 1 0 0 -1 41.67699814 11.47200012 Tm [( )] TJ ET EMC /P <</MCID 1019 >> BDC BT 1 0 0 -1 44.17699814 11.47200012 Tm [(at)] TJ ET EMC /P <</MCID 1020 >> BDC BT 1 0 0 -1 52.50699997 11.47200012 Tm [( )] TJ ET EMC /P <</MCID 1021 >> BDC BT 1 0 0 -1 55.00699997 11.47200012 Tm [(40)] TJ ET EMC /P <</Lang (zh-CN) /MCID 1022 >> BDC BT /FAAAGE 10 Tf 1 0 0 -1 65.00700378 11.47200012 Tm 2 Tr 0.2857143 w 0 G [<0003>] TJ ET EMC /P <</MCID 1023 >> BDC BT /FAAAAH 10 Tf 1 0 0 -1 75.07700348 11.47200012 Tm 0 Tr [( )] TJ ET EMC /P <</MCID 1024 >> BDC BT 1 0 0 -1 80.07700348 11.47200012 Tm [(\(mPa)] TJ ET EMC /P <</Lang (zh-CN) /MCID 1025 >> BDC BT 1 0 0 -1 102.84600067 11.47200012 Tm [(?] TJ ET EMC /P <</MCID 1026 >> BDC BT 1 0 0 -1 106.18099976 11.47200012 Tm [(s\))] TJ ET EMC /P <</MCID 1027 >> BDC BT /FAAABG 10 Tf 1 0 0 -1 113.40299988 11.47200012 Tm /GS35 gs 0 g [( )] TJ ET EMC Q Q q 1 0 0 1 127.55000305 0 cm -1 -1 m 50.59999847 -1 l 50.59999847 16.60000038 l -1 16.60000038 l h W n q 1 0 0 1 5.4000001 0 cm /P <</MCID 1028 >> BDC BT 1 0 0 -1 8.14999962 11.38599968 Tm /GS36 gs 0 g [(17.25)] TJ ET EMC /P <</MCID 1029 >> BDC BT 1 0 0 -1 30.64999962 11.38599968 Tm /GS37 gs 0 g [( )] TJ ET EMC Q Q q 1 0 0 1 177.1499939 0 cm -1 -1 m 58.95000076 -1 l 58.95000076 16.60000038 l -1 16.60000038 l h W n q 1 0 0 1 5.4000001 0 cm /P <</MCID 1030 >> BDC BT 1 0 0 -1 14.82499981 11.38599968 Tm /GS38 gs 0 g [(5.70)] TJ ET EMC /P <</MCID 1031 >> BDC BT 1 0 0 -1 32.32500076 11.38599968 Tm /GS39 gs 0 g [( )] TJ ET EMC Q Q Q q /GS40 gs 0 G 0 0.5 m 235.09999084 0.5 l S Q q /GS41 gs 0 G 0 17.10000038 m 235.09999084 17.10000038 l S Q q /GS42 gs 0 G 0 50.69999695 m 235.09999084 50.69999695 l S Q Q q 1 0 0 1 0 363.20001221 cm /P <</MCID 1032 >> BDC BT 1 0 0 -1 0 11.38599968 Tm [( )] TJ ET EMC Q q 1 0 0 1 0 378.79998779 cm /P <</MCID 1033 >> BDC BT 1 0 0 -1 0 11.38599968 Tm /GS43 gs 0 g [(In)] TJ ET EMC /P <</MCID 1034 >> BDC BT 1 0 0 -1 8.32999992 11.38599968 Tm [( )] TJ ET EMC /P <</MCID 1035 >> BDC BT 1 0 0 -1 10.94200039 11.38599968 Tm [(a)] TJ ET EMC /P <</MCID 1036 >> BDC BT 1 0 0 -1 15.38000011 11.38599968 Tm [( )] TJ ET EMC /P <</MCID 1037 >> BDC BT 1 0 0 -1 17.99200058 11.38599968 Tm [(volume)] TJ ET EMC /P <</MCID 1038 >> BDC BT 1 0 0 -1 47.98699951 11.38599968 Tm [( )] TJ ET EMC /P <</MCID 1039 >> BDC BT 1 0 0 -1 50.59899902 11.38599968 Tm [(manufac)1(turing)] TJ ET EMC /P <</MCID 1040 >> BDC BT 1 0 0 -1 108.91000366 11.38599968 Tm [( )] TJ ET EMC /P <</MCID 1041 >> BDC BT 1 0 0 -1 111.52200317 11.38599968 Tm [(environme)1(nt,)] TJ ET EMC /P <</MCID 1042 >> BDC BT 1 0 0 -1 164.56399536 11.38599968 Tm [( )] TJ ET EMC /P <</MCID 1043 >> BDC BT 1 0 0 -1 167.17599487 11.38599968 Tm [(concerni)1(ng)] TJ ET EMC /P <</MCID 1044 >> BDC BT 1 0 0 -1 211.6000061 11.38599968 Tm [( )] TJ ET EMC /P <</MCID 1045 >> BDC BT 1 0 0 -1 214.21200562 11.38599968 Tm [(cost)] TJ ET EMC /P <</MCID 1046 >> BDC BT 1 0 0 -1 230.32000732 11.38599968 Tm [( )] TJ ET EMC /P <</MCID 1047 >> BDC BT 1 0 0 -1 0 26.98600006 Tm [(of)] TJ ET EMC /P <</MCID 1048 >> BDC BT 1 0 0 -1 8.32999992 26.98600006 Tm [( )] TJ ET EMC /P <</MCID 1049 >> BDC BT 1 0 0 -1 11.04500008 26.98600006 Tm [(consumption)] TJ ET EMC /P <</MCID 1050 >> BDC BT 1 0 0 -1 62.70999908 26.98600006 Tm [( )] TJ ET EMC /P <</MCID 1051 >> BDC BT 1 0 0 -1 65.42500305 26.98600006 Tm [(\(CoC\),)] TJ ET EMC /P <</MCID 1052 >> BDC BT 1 0 0 -1 92.92500305 26.98600006 Tm [( )] TJ ET EMC /P <</MCID 1053 >> BDC BT 1 0 0 -1 95.63999939 26.98600006 Tm [(both)] TJ ET EMC /P <</MCID 1054 >> BDC BT 1 0 0 -1 113.41799927 26.98600006 Tm [( )] TJ ET EMC /P <</MCID 1055 >> BDC BT 1 0 0 -1 116.13300323 26.98600006 Tm [(ST250)] TJ ET EMC /P <</MCID 1056 >> BDC BT 1 0 0 -1 142.80299377 26.98600006 Tm [( )] TJ ET EMC /P <</MCID 1057 >> BDC BT 1 0 0 -1 145.51800537 26.98600006 Tm [(and)] TJ ET EMC /P <</MCID 1058 >> BDC BT 1 0 0 -1 159.95599365 26.98600006 Tm [( )] TJ ET EMC /P <</MCID 1059 >> BDC BT 1 0 0 -1 162.67100525 26.98600006 Tm [(ICS8000)] TJ ET EMC /P <</MCID 1060 >> BDC BT 1 0 0 -1 198.23300171 26.98600006 Tm [( )] TJ ET EMC /P <</MCID 1061 >> BDC BT 1 0 0 -1 200.94799805 26.98600006 Tm [(need)] TJ ET EMC /P <</MCID 1062 >> BDC BT 1 0 0 -1 219.82499695 26.98600006 Tm [( )] TJ ET EMC /P <</MCID 1063 >> BDC BT 1 0 0 -1 222.53999329 26.98600006 Tm [(to)] TJ ET EMC /P <</MCID 1064 >> BDC BT 1 0 0 -1 230.31799316 26.98600006 Tm [( )] TJ ET EMC /P <</MCID 1065 >> BDC BT 1 0 0 -1 0 42.58599854 Tm [(be)] TJ ET EMC /P <</MCID 1066 >> BDC BT 1 0 0 -1 9.43799973 42.58599854 Tm [( )] TJ ET EMC /P <</MCID 1067 >> BDC BT 1 0 0 -1 12.25899982 42.58599854 Tm [(recla)1(imed)] TJ ET EMC /P <</MCID 1068 >> BDC BT 1 0 0 -1 51.6780014 42.58599854 Tm [( )] TJ ET EMC /P <</MCID 1069 >> BDC BT 1 0 0 -1 54.49900055 42.58599854 Tm [(every)] TJ ET EMC /P <</MCID 1070 >> BDC BT 1 0 0 -1 76.70600128 42.58599854 Tm [( )] TJ ET EMC /P <</MCID 1071 >> BDC BT 1 0 0 -1 79.52700043 42.58599854 Tm [(tim)1(e)] TJ ET EMC /P <</MCID 1072 >> BDC BT 1 0 0 -1 97.30000305 42.58599854 Tm [( )] TJ ET EMC /P <</MCID 1073 >> BDC BT 1 0 0 -1 100.1210022 42.58599854 Tm [(and)] TJ ET EMC /P <</MCID 1074 >> BDC BT 1 0 0 -1 114.55899811 42.58599854 Tm [( )] TJ ET EMC /P <</MCID 1075 >> BDC BT 1 0 0 -1 117.37999725 42.58599854 Tm [(reused)] TJ ET EMC /P <</MCID 1076 >> BDC BT 1 0 0 -1 143.47900391 42.58599854 Tm [( )] TJ ET EMC /P <</MCID 1077 >> BDC BT 1 0 0 -1 146.30000305 42.58599854 Tm [(within)] TJ ET EMC /P <</MCID 1078 >> BDC BT 1 0 0 -1 171.85699463 42.58599854 Tm [( )] TJ ET EMC /P <</MCID 1079 >> BDC BT 1 0 0 -1 174.67799377 42.58599854 Tm [(up)] TJ ET EMC /P <</MCID 1080 >> BDC BT 1 0 0 -1 184.67799377 42.58599854 Tm [( )] TJ ET EMC /P <</MCID 1081 >> BDC BT 1 0 0 -1 187.49899292 42.58599854 Tm [(to)] TJ ET EMC /P <</MCID 1082 >> BDC BT 1 0 0 -1 195.2769928 42.58599854 Tm [( )] TJ ET EMC /P <</MCID 1083 >> BDC BT 1 0 0 -1 198.0980072 42.58599854 Tm [(72hours)] TJ ET EMC /P <</MCID 1084 >> BDC BT 1 0 0 -1 230.32000732 42.58599854 Tm [( )] TJ ET EMC /P <</MCID 1085 >> BDC BT 1 0 0 -1 0 58.18599701 Tm [(of)] TJ ET EMC /P <</MCID 1086 >> BDC BT 1 0 0 -1 8.32999992 58.18599701 Tm [( )] TJ ET EMC /P <</MCID 1087 >> BDC BT 1 0 0 -1 12.19799995 58.18599701 Tm [(their)] TJ ET EMC /P <</MCID 1088 >> BDC BT 1 0 0 -1 30.52300072 58.18599701 Tm [( )] TJ ET EMC /P <</MCID 1089 >> BDC BT 1 0 0 -1 34.39099884 58.18599701 Tm [(lifet)1(ime.)] TJ ET EMC /P <</MCID 1090 >> BDC BT 1 0 0 -1 67.98999786 58.18599701 Tm [( )] TJ ET EMC /P <</MCID 1091 >> BDC BT 1 0 0 -1 71.85800171 58.18599701 Tm [(To)] TJ ET EMC /P <</MCID 1092 >> BDC BT 1 0 0 -1 82.96600342 58.18599701 Tm [( )] TJ ET EMC /P <</MCID 1093 >> BDC BT 1 0 0 -1 86.83399963 58.18599701 Tm [(control)] TJ ET EMC /P <</MCID 1094 >> BDC BT 1 0 0 -1 115.15899658 58.18599701 Tm [( )] TJ ET EMC /P <</MCID 1095 >> BDC BT 1 0 0 -1 119.02700043 58.18599701 Tm [(lifet)1(ime)] TJ ET EMC /P <</MCID 1096 >> BDC BT 1 0 0 -1 150.12600708 58.18599701 Tm [( )] TJ ET EMC /P <</MCID 1097 >> BDC BT 1 0 0 -1 153.9940033 58.18599701 Tm [(of)] TJ ET EMC /P <</MCID 1098 >> BDC BT 1 0 0 -1 162.32400513 58.18599701 Tm [( )] TJ ET EMC /P <</MCID 1099 >> BDC BT 1 0 0 -1 166.19200134 58.18599701 Tm [(both)] TJ ET EMC /P <</MCID 1100 >> BDC BT 1 0 0 -1 183.97000122 58.18599701 Tm [( )] TJ ET EMC /P <</MCID 1101 >> BDC BT 1 0 0 -1 187.83799744 58.18599701 Tm [(chemi)1(cals,)] TJ ET EMC /P <</MCID 1102 >> BDC BT 1 0 0 -1 230.31799316 58.18599701 Tm [( )] TJ ET EMC /P <</MCID 1103 >> BDC BT 1 0 0 -1 0 73.78600311 Tm [(two)] TJ ET EMC /P <</MCID 1104 >> BDC BT 1 0 0 -1 15 73.78600311 Tm [( )] TJ ET EMC /P <</MCID 1105 >> BDC BT 1 0 0 -1 19.11199951 73.78600311 Tm [(standards)] TJ ET EMC /P <</MCID 1106 >> BDC BT 1 0 0 -1 56.88100052 73.78600311 Tm [( )] TJ ET EMC /P <</MCID 1107 >> BDC BT 1 0 0 -1 60.99300003 73.78600311 Tm [(are)] TJ ET EMC /P <</MCID 1108 >> BDC BT 1 0 0 -1 73.19999695 73.78600311 Tm [( )] TJ ET EMC /P <</MCID 1109 >> BDC BT 1 0 0 -1 77.31199646 73.78600311 Tm [(proposed)] TJ ET EMC /P <</MCID 1110 >> BDC BT 1 0 0 -1 113.97200012 73.78600311 Tm [( )] TJ ET EMC /P <</MCID 1111 >> BDC BT 1 0 0 -1 118.08399963 73.78600311 Tm [(for)] TJ ET EMC /P <</MCID 1112 >> BDC BT 1 0 0 -1 129.7440033 73.78600311 Tm [( )] TJ ET EMC /P <</MCID 1113 >> BDC BT 1 0 0 -1 133.85600281 73.78600311 Tm [(the)] TJ ET EMC /P <</MCID 1114 >> BDC BT 1 0 0 -1 146.07299805 73.78600311 Tm [( )] TJ ET EMC /P <</MCID 1115 >> BDC BT 1 0 0 -1 150.18499756 73.78600311 Tm [(machi)1(ne)] TJ ET EMC /P <</MCID 1116 >> BDC BT 1 0 0 -1 184.05700684 73.78600311 Tm [( )] TJ ET EMC /P <</MCID 1117 >> BDC BT 1 0 0 -1 188.16900635 73.78600311 Tm [(itself.)] TJ ET EMC /P <</MCID 1118 >> BDC BT 1 0 0 -1 210.66400146 73.78600311 Tm [( )] TJ ET EMC /P <</MCID 1119 >> BDC BT 1 0 0 -1 214.77600098 73.78600311 Tm [(The)] TJ ET EMC /P <</MCID 1120 >> BDC BT 1 0 0 -1 230.32299805 73.78600311 Tm [( )] TJ ET EMC /P <</MCID 1121 >> BDC BT 1 0 0 -1 0 89.38600159 Tm [(first)] TJ ET EMC /P <</MCID 1122 >> BDC BT 1 0 0 -1 16.1079998 89.38600159 Tm [( )] TJ ET EMC /P <</MCID 1123 >> BDC BT 1 0 0 -1 19.97800064 89.38600159 Tm [(is)] TJ ET EMC /P <</MCID 1124 >> BDC BT 1 0 0 -1 26.64800072 89.38600159 Tm [( )] TJ ET EMC /P <</MCID 1125 >> BDC BT 1 0 0 -1 30.51799965 89.38600159 Tm [(to)] TJ ET EMC /P <</MCID 1126 >> BDC BT 1 0 0 -1 38.29600143 89.38600159 Tm [( )] TJ ET EMC /P <</MCID 1127 >> BDC BT 1 0 0 -1 42.16600037 89.38600159 Tm [(strictl)1(y)] TJ ET EMC /P <</MCID 1128 >> BDC BT 1 0 0 -1 69.93900299 89.38600159 Tm [( )] TJ ET EMC /P <</MCID 1129 >> BDC BT 1 0 0 -1 73.80899811 89.38600159 Tm [(control)] TJ ET EMC /P <</MCID 1130 >> BDC BT 1 0 0 -1 102.13400269 89.38600159 Tm [( )] TJ ET EMC /P <</MCID 1131 >> BDC BT 1 0 0 -1 106.0039978 89.38600159 Tm [(the)] TJ ET EMC /P <</MCID 1132 >> BDC BT 1 0 0 -1 118.22100067 89.38600159 Tm [( )] TJ ET EMC /P <</MCID 1133 >> BDC BT 1 0 0 -1 122.09100342 89.38600159 Tm [(water)] TJ ET EMC /P <</MCID 1134 >> BDC BT 1 0 0 -1 144.29800415 89.38600159 Tm [( )] TJ ET EMC /P <</MCID 1135 >> BDC BT 1 0 0 -1 148.16799927 89.38600159 Tm [(concent)1(ration)] TJ ET EMC /P <</MCID 1136 >> BDC BT 1 0 0 -1 202.58700562 89.38600159 Tm [( )] TJ ET EMC /P <</MCID 1137 >> BDC BT 1 0 0 -1 206.45700073 89.38600159 Tm [(in)] TJ ET EMC /P <</MCID 1138 >> BDC BT 1 0 0 -1 214.23500061 89.38600159 Tm [( )] TJ ET EMC /P <</MCID 1139 >> BDC BT 1 0 0 -1 218.10499573 89.38600159 Tm [(the)] TJ ET EMC /P <</MCID 1140 >> BDC BT 1 0 0 -1 230.32200623 89.38600159 Tm [( )] TJ ET EMC /P <</MCID 1141 >> BDC BT 1 0 0 -1 0 104.98600006 Tm [(chemi)1(cals.)] TJ ET EMC /P <</MCID 1142 >> BDC BT 1 0 0 -1 42.47999954 104.98600006 Tm [( )] TJ ET EMC /P <</MCID 1143 >> BDC BT 1 0 0 -1 46.13800049 104.98600006 Tm [(The)] TJ ET EMC /P <</MCID 1144 >> BDC BT 1 0 0 -1 61.68500137 104.98600006 Tm [( )] TJ ET EMC /P <</MCID 1145 >> BDC BT 1 0 0 -1 65.34300232 104.98600006 Tm [(second)] TJ ET EMC /P <</MCID 1146 >> BDC BT 1 0 0 -1 93.11199951 104.98600006 Tm [( )] TJ ET EMC /P <</MCID 1147 >> BDC BT 1 0 0 -1 96.76999664 104.98600006 Tm [(is)] TJ ET EMC /P <</MCID 1148 >> BDC BT 1 0 0 -1 103.44000244 104.98600006 Tm [( )] TJ ET EMC /P <</MCID 1149 >> BDC BT 1 0 0 -1 107.09799957 104.98600006 Tm [(in)] TJ ET EMC /P <</MCID 1150 >> BDC BT 1 0 0 -1 114.87599945 104.98600006 Tm [( )] TJ ET EMC /P <</MCID 1151 >> BDC BT 1 0 0 -1 118.53399658 104.98600006 Tm [(referenc)1(e)] TJ ET EMC /P <</MCID 1152 >> BDC BT 1 0 0 -1 155.71699524 104.98600006 Tm [( )] TJ ET EMC /P <</MCID 1153 >> BDC BT 1 0 0 -1 159.375 104.98600006 Tm [(to)] TJ ET EMC /P <</MCID 1154 >> BDC BT 1 0 0 -1 167.15299988 104.98600006 Tm [( )] TJ ET EMC /P <</MCID 1155 >> BDC BT 1 0 0 -1 170.81100464 104.98600006 Tm [(a)] TJ ET EMC /P <</MCID 1156 >> BDC BT 1 0 0 -1 175.24899292 104.98600006 Tm [( )] TJ ET EMC /P <</MCID 1157 >> BDC BT 1 0 0 -1 178.90699768 104.98600006 Tm [(high)] TJ ET EMC /P <</MCID 1158 >> BDC BT 1 0 0 -1 196.68499756 104.98600006 Tm [( )] TJ ET EMC /P <</MCID 1159 >> BDC BT 1 0 0 -1 200.34300232 104.98600006 Tm [(recla)1(im)] TJ ET EMC /P <</MCID 1160 >> BDC BT 1 0 0 -1 230.32299805 104.98600006 Tm [( )] TJ ET EMC /P <</MCID 1161 >> BDC BT 1 0 0 -1 0 120.58599854 Tm [(rate)] TJ ET EMC /P <</MCID 1162 >> BDC BT 1 0 0 -1 14.98499966 120.58599854 Tm [( )] TJ ET EMC /P <</MCID 1163 >> BDC BT 1 0 0 -1 19.19099998 120.58599854 Tm [(of)] TJ ET EMC /P <</MCID 1164 >> BDC BT 1 0 0 -1 27.52099991 120.58599854 Tm [( )] TJ ET EMC /P <</MCID 1165 >> BDC BT 1 0 0 -1 31.72699928 120.58599854 Tm [(the)] TJ ET EMC /P <</MCID 1166 >> BDC BT 1 0 0 -1 43.94400024 120.58599854 Tm [( )] TJ ET EMC /P <</MCID 1167 >> BDC BT 1 0 0 -1 48.15000153 120.58599854 Tm [(chemi)1(cals.)] TJ ET EMC /P <</MCID 1168 >> BDC BT 1 0 0 -1 90.62999725 120.58599854 Tm [( )] TJ ET EMC /P <</MCID 1169 >> BDC BT 1 0 0 -1 94.83599854 120.58599854 Tm [(If)] TJ ET EMC /P <</MCID 1170 >> BDC BT 1 0 0 -1 101.4960022 120.58599854 Tm [( )] TJ ET EMC /P <</MCID 1171 >> BDC BT 1 0 0 -1 105.70200348 120.58599854 Tm [(the)] TJ ET EMC /P <</MCID 1172 >> BDC BT 1 0 0 -1 117.91899872 120.58599854 Tm [( )] TJ ET EMC /P <</MCID 1173 >> BDC BT 1 0 0 -1 122.125 120.58599854 Tm [(water)] TJ ET EMC /P <</MCID 1174 >> BDC BT 1 0 0 -1 144.33200073 120.58599854 Tm [( )] TJ ET EMC /P <</MCID 1175 >> BDC BT 1 0 0 -1 148.53799438 120.58599854 Tm [(content)] TJ ET EMC /P <</MCID 1176 >> BDC BT 1 0 0 -1 177.97200012 120.58599854 Tm [( )] TJ ET EMC /P <</MCID 1177 >> BDC BT 1 0 0 -1 182.17799377 120.58599854 Tm [(is)] TJ ET EMC /P <</MCID 1178 >> BDC BT 1 0 0 -1 188.8480072 120.58599854 Tm [( )] TJ ET EMC /P <</MCID 1179 >> BDC BT 1 0 0 -1 193.05400085 120.58599854 Tm [(too)] TJ ET EMC /P <</MCID 1180 >> BDC BT 1 0 0 -1 205.83200073 120.58599854 Tm [( )] TJ ET EMC /P <</MCID 1181 >> BDC BT 1 0 0 -1 210.03799438 120.58599854 Tm [(high,)] TJ ET EMC /P <</MCID 1182 >> BDC BT 1 0 0 -1 230.31599426 120.58599854 Tm [( )] TJ ET EMC /P <</MCID 1183 >> BDC BT 1 0 0 -1 0 136.18600464 Tm [(fluorides)] TJ ET EMC /P <</MCID 1184 >> BDC BT 1 0 0 -1 35.54700089 136.18600464 Tm [( )] TJ ET EMC /P <</MCID 1185 >> BDC BT 1 0 0 -1 41.27600098 136.18600464 Tm [(dissociati)1(on)] TJ ET EMC /P <</MCID 1186 >> BDC BT 1 0 0 -1 89.0490036 136.18600464 Tm [( )] TJ ET EMC /P <</MCID 1187 >> BDC BT 1 0 0 -1 94.77799988 136.18600464 Tm [(will)] TJ ET EMC /P <</MCID 1188 >> BDC BT 1 0 0 -1 110.33499908 136.18600464 Tm [( )] TJ ET EMC /P <</MCID 1189 >> BDC BT 1 0 0 -1 116.06400299 136.18600464 Tm [(be)] TJ ET EMC /P <</MCID 1190 >> BDC BT 1 0 0 -1 125.5019989 136.18600464 Tm [( )] TJ ET EMC /P <</MCID 1191 >> BDC BT 1 0 0 -1 131.23100281 136.18600464 Tm [(enhance)1(d,)] TJ ET EMC /P <</MCID 1192 >> BDC BT 1 0 0 -1 171.48500061 136.18600464 Tm [( )] TJ ET EMC /P <</MCID 1193 >> BDC BT 1 0 0 -1 177.21400452 136.18600464 Tm [(leadi)1(ng)] TJ ET EMC /P <</MCID 1194 >> BDC BT 1 0 0 -1 206.647995 136.18600464 Tm [( )] TJ ET EMC /P <</MCID 1195 >> BDC BT 1 0 0 -1 212.3769989 136.18600464 Tm [(to)] TJ ET EMC /P <</MCID 1196 >> BDC BT 1 0 0 -1 220.15499878 136.18600464 Tm [( )] TJ ET EMC /P <</MCID 1197 >> BDC BT 1 0 0 -1 225.88400269 136.18600464 Tm [(a)] TJ ET EMC /P <</MCID 1198 >> BDC BT 1 0 0 -1 230.32200623 136.18600464 Tm [( )] TJ ET EMC /P <</MCID 1199 >> BDC BT 1 0 0 -1 0 151.78599548 Tm [(sharp)] TJ ET EMC /P <</MCID 1200 >> BDC BT 1 0 0 -1 21.65999985 151.78599548 Tm [( )] TJ ET EMC /P <</MCID 1201 >> BDC BT 1 0 0 -1 24.63800049 151.78599548 Tm [(increa)1(s)-1(e)] TJ ET EMC /P <</MCID 1202 >> BDC BT 1 0 0 -1 57.39199829 151.78599548 Tm [( )] TJ ET EMC /P <</MCID 1203 >> BDC BT 1 0 0 -1 60.36999893 151.78599548 Tm [(in)] TJ ET EMC /P <</MCID 1204 >> BDC BT 1 0 0 -1 68.14800262 151.78599548 Tm [( )] TJ ET EMC /P <</MCID 1205 >> BDC BT 1 0 0 -1 71.12599945 151.78599548 Tm [(the)] TJ ET EMC /P <</MCID 1206 >> BDC BT 1 0 0 -1 83.34300232 151.78599548 Tm [( )] TJ ET EMC /P <</MCID 1207 >> BDC BT 1 0 0 -1 86.32099915 151.78599548 Tm [(etchi)1(ng)] TJ ET EMC /P <</MCID 1208 >> BDC BT 1 0 0 -1 115.75499725 151.78599548 Tm [( )] TJ ET EMC /P <</MCID 1209 >> BDC BT 1 0 0 -1 118.73300171 151.78599548 Tm [(rate)] TJ ET EMC /P <</MCID 1210 >> BDC BT 1 0 0 -1 133.71800232 151.78599548 Tm [( )] TJ ET EMC /P <</MCID 1211 >> BDC BT 1 0 0 -1 136.69599915 151.78599548 Tm [(of)] TJ ET EMC /P <</MCID 1212 >> BDC BT 1 0 0 -1 145.02600098 151.78599548 Tm [( )] TJ ET EMC /P <</MCID 1213 >> BDC BT 1 0 0 -1 148.0039978 151.78599548 Tm [(copper)] TJ ET EMC /P <</MCID 1214 >> BDC BT 1 0 0 -1 175.21099854 151.78599548 Tm [( )] TJ ET EMC /P <</MCID 1215 >> BDC BT 1 0 0 -1 178.18899536 151.78599548 Tm [(meta)1(l,)] TJ ET EMC /P <</MCID 1216 >> BDC BT 1 0 0 -1 202.90100098 151.78599548 Tm [( )] TJ ET EMC /P <</MCID 1217 >> BDC BT 1 0 0 -1 205.8789978 151.78599548 Tm [(which)] TJ ET EMC /P <</MCID 1218 >> BDC BT 1 0 0 -1 230.31700134 151.78599548 Tm [( )] TJ ET EMC /P <</MCID 1219 >> BDC BT 1 0 0 -1 0 167.38600159 Tm [(will)] TJ ET EMC /P <</MCID 1220 >> BDC BT 1 0 0 -1 15.55700016 167.38600159 Tm [( )] TJ ET EMC /P <</MCID 1221 >> BDC BT 1 0 0 -1 20.12400055 167.38600159 Tm [(cause)] TJ ET EMC /P <</MCID 1222 >> BDC BT 1 0 0 -1 42.33100128 167.38600159 Tm [( )] TJ ET EMC /P <</MCID 1223 >> BDC BT 1 0 0 -1 46.89799881 167.38600159 Tm [(the)] TJ ET EMC /P <</MCID 1224 >> BDC BT 1 0 0 -1 59.11500168 167.38600159 Tm [( )] TJ ET EMC /P <</MCID 1225 >> BDC BT 1 0 0 -1 63.68199921 167.38600159 Tm [(excessive)] TJ ET EMC /P <</MCID 1226 >> BDC BT 1 0 0 -1 101.99700165 167.38600159 Tm [( )] TJ ET EMC /P <</MCID 1227 >> BDC BT 1 0 0 -1 106.56400299 167.38600159 Tm [(loss)] TJ ET EMC /P <</MCID 1228 >> BDC BT 1 0 0 -1 122.12599945 167.38600159 Tm [( )] TJ ET EMC /P <</MCID 1229 >> BDC BT 1 0 0 -1 126.69300079 167.38600159 Tm [(of)] TJ ET EMC /P <</MCID 1230 >> BDC BT 1 0 0 -1 135.022995 167.38600159 Tm [( )] TJ ET EMC /P <</MCID 1231 >> BDC BT 1 0 0 -1 139.58999634 167.38600159 Tm [(copper.)] TJ ET EMC /P <</MCID 1232 >> BDC BT 1 0 0 -1 169.29699707 167.38600159 Tm [( )] TJ ET EMC /P <</MCID 1233 >> BDC BT 1 0 0 -1 173.86399841 167.38600159 Tm [(If)] TJ ET EMC /P <</MCID 1234 >> BDC BT 1 0 0 -1 180.52400208 167.38600159 Tm [( )] TJ ET EMC /P <</MCID 1235 >> BDC BT 1 0 0 -1 185.09100342 167.38600159 Tm [(there)] TJ ET EMC /P <</MCID 1236 >> BDC BT 1 0 0 -1 205.07600403 167.38600159 Tm [( )] TJ ET EMC /P <</MCID 1237 >> BDC BT 1 0 0 -1 209.64300537 167.38600159 Tm [(is)] TJ ET EMC /P <</MCID 1238 >> BDC BT 1 0 0 -1 216.31300354 167.38600159 Tm [( )] TJ ET EMC /P <</MCID 1239 >> BDC BT 1 0 0 -1 220.88000488 167.38600159 Tm [(an)] TJ ET EMC /P <</MCID 1240 >> BDC BT 1 0 0 -1 230.31799316 167.38600159 Tm [( )] TJ ET EMC /P <</MCID 1241 >> BDC BT 1 0 0 -1 0 182.98600769 Tm [(excessive)] TJ ET EMC /P <</MCID 1242 >> BDC BT 1 0 0 -1 38.31499863 182.98600769 Tm [( )] TJ ET EMC /P <</MCID 1243 >> BDC BT 1 0 0 -1 41.2840004 182.98600769 Tm [(loss)] TJ ET EMC /P <</MCID 1244 >> BDC BT 1 0 0 -1 56.84600067 182.98600769 Tm [( )] TJ ET EMC /P <</MCID 1245 >> BDC BT 1 0 0 -1 59.81499863 182.98600769 Tm [(of)] TJ ET EMC /P <</MCID 1246 >> BDC BT 1 0 0 -1 68.14499664 182.98600769 Tm [( )] TJ ET EMC /P <</MCID 1247 >> BDC BT 1 0 0 -1 71.11399841 182.98600769 Tm [(water,)] TJ ET EMC /P <</MCID 1248 >> BDC BT 1 0 0 -1 95.82099915 182.98600769 Tm [( )] TJ ET EMC /P <</MCID 1249 >> BDC BT 1 0 0 -1 98.79000092 182.98600769 Tm [(react)1(ive)] TJ ET EMC /P <</MCID 1250 >> BDC BT 1 0 0 -1 130.43099976 182.98600769 Tm [( )] TJ ET EMC /P <</MCID 1251 >> BDC BT 1 0 0 -1 133.3999939 182.98600769 Tm [(species)] TJ ET EMC /P <</MCID 1252 >> BDC BT 1 0 0 -1 162.2769928 182.98600769 Tm [( )] TJ ET EMC /P <</MCID 1253 >> BDC BT 1 0 0 -1 165.2460022 182.98600769 Tm [(will)] TJ ET EMC /P <</MCID 1254 >> BDC BT 1 0 0 -1 180.80299377 182.98600769 Tm [( )] TJ ET EMC /P <</MCID 1255 >> BDC BT 1 0 0 -1 183.77200317 182.98600769 Tm [(be)] TJ ET EMC /P <</MCID 1256 >> BDC BT 1 0 0 -1 193.21000671 182.98600769 Tm [( )] TJ ET EMC /P <</MCID 1257 >> BDC BT 1 0 0 -1 196.17900085 182.98600769 Tm [(reduced,)] TJ ET EMC /P <</MCID 1258 >> BDC BT 1 0 0 -1 230.32499695 182.98600769 Tm [( )] TJ ET EMC /P <</MCID 1259 >> BDC BT 1 0 0 -1 0 198.58599854 Tm [(which)] TJ ET EMC /P <</MCID 1260 >> BDC BT 1 0 0 -1 24.43799973 198.58599854 Tm [( )] TJ ET EMC /P <</MCID 1261 >> BDC BT 1 0 0 -1 27.44599915 198.58599854 Tm [(will)] TJ ET EMC /P <</MCID 1262 >> BDC BT 1 0 0 -1 43.00299835 198.58599854 Tm [( )] TJ ET EMC /P <</MCID 1263 >> BDC BT 1 0 0 -1 46.01100159 198.58599854 Tm [(have)] TJ ET EMC /P <</MCID 1264 >> BDC BT 1 0 0 -1 64.88800049 198.58599854 Tm [( )] TJ ET EMC /P <</MCID 1265 >> BDC BT 1 0 0 -1 67.89600372 198.58599854 Tm [(a)] TJ ET EMC /P <</MCID 1266 >> BDC BT 1 0 0 -1 72.33399963 198.58599854 Tm [( )] TJ ET EMC /P <</MCID 1267 >> BDC BT 1 0 0 -1 75.34200287 198.58599854 Tm [(direct)] TJ ET EMC /P <</MCID 1268 >> BDC BT 1 0 0 -1 98.10600281 198.58599854 Tm [( )] TJ ET EMC /P <</MCID 1269 >> BDC BT 1 0 0 -1 101.11399841 198.58599854 Tm [(negati)1(ve)] TJ ET EMC /P <</MCID 1270 >> BDC BT 1 0 0 -1 134.98599243 198.58599854 Tm [( )] TJ ET EMC /P <</MCID 1271 >> BDC BT 1 0 0 -1 137.9940033 198.58599854 Tm [(impac)1(t)] TJ ET EMC /P <</MCID 1272 >> BDC BT 1 0 0 -1 165.20599365 198.58599854 Tm [( )] TJ ET EMC /P <</MCID 1273 >> BDC BT 1 0 0 -1 168.21400452 198.58599854 Tm [(on)] TJ ET EMC /P <</MCID 1274 >> BDC BT 1 0 0 -1 178.21400452 198.58599854 Tm [( )] TJ ET EMC /P <</MCID 1275 >> BDC BT 1 0 0 -1 181.22200012 198.58599854 Tm [(the)] TJ ET EMC /P <</MCID 1276 >> BDC BT 1 0 0 -1 193.43899536 198.58599854 Tm [( )] TJ ET EMC /P <</MCID 1277 >> BDC BT 1 0 0 -1 196.44700623 198.58599854 Tm [(clea)1(ning)] TJ ET EMC /P <</MCID 1278 >> BDC BT 1 0 0 -1 230.31900024 198.58599854 Tm [( )] TJ ET EMC /P <</MCID 1279 >> BDC BT 1 0 0 -1 0 214.18600464 Tm [(effect)1(s)] TJ ET EMC /P <</MCID 1280 >> BDC BT 1 0 0 -1 26.64599991 214.18600464 Tm [( )] TJ ET EMC /P <</MCID 1281 >> BDC BT 1 0 0 -1 34.44499969 214.18600464 Tm [(and)] TJ ET EMC /P <</MCID 1282 >> BDC BT 1 0 0 -1 48.88299942 214.18600464 Tm [( )] TJ ET EMC /P <</MCID 1283 >> BDC BT 1 0 0 -1 56.68199921 214.18600464 Tm [(ma)] TJ ET EMC /P <</MCID 1284 >> BDC BT 1 0 0 -1 68.89900208 214.18600464 Tm [(ke)] TJ ET EMC /P <</MCID 1285 >> BDC BT 1 0 0 -1 78.33699799 214.18600464 Tm [( )] TJ ET EMC /P <</MCID 1286 >> BDC BT 1 0 0 -1 86.13600159 214.18600464 Tm [(the)] TJ ET EMC /P <</MCID 1287 >> BDC BT 1 0 0 -1 98.35299683 214.18600464 Tm [( )] TJ ET EMC /P <</MCID 1288 >> BDC BT 1 0 0 -1 106.15200043 214.18600464 Tm [(residue)] TJ ET EMC /P <</MCID 1289 >> BDC BT 1 0 0 -1 135.02900696 214.18600464 Tm [( )] TJ ET EMC /P <</MCID 1290 >> BDC BT 1 0 0 -1 142.82800293 214.18600464 Tm [(removal)] TJ ET EMC /P <</MCID 1291 >> BDC BT 1 0 0 -1 175.59199524 214.18600464 Tm [( )] TJ ET EMC /P <</MCID 1292 >> BDC BT 1 0 0 -1 183.39100647 214.18600464 Tm [(incompl)1(ete.)] TJ ET EMC /P <</MCID 1293 >> BDC BT 1 0 0 -1 230.32000732 214.18600464 Tm [( )] TJ ET EMC /P <</MCID 1294 >> BDC BT 1 0 0 -1 0 229.78599548 Tm [(Neverthel)1(ess)-1(,)] TJ ET EMC /P <</MCID 1295 >> BDC BT 1 0 0 -1 54.14599991 229.78599548 Tm [( )] TJ ET EMC /P <</MCID 1296 >> BDC BT 1 0 0 -1 59.08000183 229.78599548 Tm [(the)] TJ ET EMC /P <</MCID 1297 >> BDC BT 1 0 0 -1 71.29699707 229.78599548 Tm [( )] TJ ET EMC /P <</MCID 1298 >> BDC BT 1 0 0 -1 76.23100281 229.78599548 Tm [(etchi)1(ng)] TJ ET EMC /P <</MCID 1299 >> BDC BT 1 0 0 -1 105.66500092 229.78599548 Tm [( )] TJ ET EMC /P <</MCID 1300 >> BDC BT 1 0 0 -1 110.59899902 229.78599548 Tm [(rate)] TJ ET EMC /P <</MCID 1301 >> BDC BT 1 0 0 -1 125.58399963 229.78599548 Tm [( )] TJ ET EMC /P <</MCID 1302 >> BDC BT 1 0 0 -1 130.51800537 229.78599548 Tm [(of)] TJ ET EMC /P <</MCID 1303 >> BDC BT 1 0 0 -1 138.8480072 229.78599548 Tm [( )] TJ ET EMC /P <</MCID 1304 >> BDC BT 1 0 0 -1 143.78199768 229.78599548 Tm [(ST250)] TJ ET EMC /P <</MCID 1305 >> BDC BT 1 0 0 -1 170.45199585 229.78599548 Tm [( )] TJ ET EMC /P <</MCID 1306 >> BDC BT 1 0 0 -1 175.38600159 229.78599548 Tm [(and)] TJ ET EMC /P <</MCID 1307 >> BDC BT 1 0 0 -1 189.82400513 229.78599548 Tm [( )] TJ ET EMC /P <</MCID 1308 >> BDC BT 1 0 0 -1 194.75799561 229.78599548 Tm [(ICS8000)] TJ ET EMC /P <</MCID 1309 >> BDC BT 1 0 0 -1 230.32000732 229.78599548 Tm [( )] TJ ET EMC /P <</MCID 1310 >> BDC BT 1 0 0 -1 0 245.38600159 Tm [(does)] TJ ET EMC /P <</MCID 1311 >> BDC BT 1 0 0 -1 18.32999992 245.38600159 Tm [( )] TJ ET EMC /P <</MCID 1312 >> BDC BT 1 0 0 -1 21.00600052 245.38600159 Tm [(not)] TJ ET EMC /P <</MCID 1313 >> BDC BT 1 0 0 -1 33.7840004 245.38600159 Tm [( )] TJ ET EMC /P <</MCID 1314 >> BDC BT 1 0 0 -1 36.45999908 245.38600159 Tm [(change)] TJ ET EMC /P <</MCID 1315 >> BDC BT 1 0 0 -1 64.77500153 245.38600159 Tm [( )] TJ ET EMC /P <</MCID 1316 >> BDC BT 1 0 0 -1 67.4509964 245.38600159 Tm [(a)] TJ ET EMC /P <</MCID 1317 >> BDC BT 1 0 0 -1 71.88899994 245.38600159 Tm [( )] TJ ET EMC /P <</MCID 1318 >> BDC BT 1 0 0 -1 74.56500244 245.38600159 Tm [(lot)] TJ ET EMC /P <</MCID 1319 >> BDC BT 1 0 0 -1 85.12200165 245.38600159 Tm [( )] TJ ET EMC /P <</MCID 1320 >> BDC BT 1 0 0 -1 87.79799652 245.38600159 Tm [(within)] TJ ET EMC /P <</MCID 1321 >> BDC BT 1 0 0 -1 113.35500336 245.38600159 Tm [( )] TJ ET EMC /P <</MCID 1322 >> BDC BT 1 0 0 -1 116.03099823 245.38600159 Tm [(72hours)] TJ ET EMC /P <</MCID 1323 >> BDC BT 1 0 0 -1 148.25300598 245.38600159 Tm [( )] TJ ET EMC /P <</MCID 1324 >> BDC BT 1 0 0 -1 150.92900085 245.38600159 Tm [(of)] TJ ET EMC /P <</MCID 1325 >> BDC BT 1 0 0 -1 159.25900269 245.38600159 Tm [( )] TJ ET EMC /P <</MCID 1326 >> BDC BT 1 0 0 -1 161.93499756 245.38600159 Tm [(the)] TJ ET EMC /P <</MCID 1327 >> BDC BT 1 0 0 -1 174.1519928 245.38600159 Tm [( )] TJ ET EMC /P <</MCID 1328 >> BDC BT 1 0 0 -1 176.82800293 245.38600159 Tm [(bath)] TJ ET EMC /P <</MCID 1329 >> BDC BT 1 0 0 -1 194.04499817 245.38600159 Tm [( )] TJ ET EMC /P <</MCID 1330 >> BDC BT 1 0 0 -1 196.72099304 245.38600159 Tm [(lifet)1(ime,)] TJ ET EMC /P <</MCID 1331 >> BDC BT 1 0 0 -1 230.32000732 245.38600159 Tm [( )] TJ ET EMC Q Q Q 1 0 0 -1 0 841.90002441 cm 
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? 2016 The Monotype Corporation. All Rights Reserved. Times New RomanRegularMonotype:Times New Roman Regular (Microsoft)Version 6.96TimesNewRomanPSMTTimes New Roman is a trademark of The Monotype Corporation.Monotype Type Drawing Office - Stanley Morison, Victor Lardent 1932Microsoft supplied font. You may use this font to create, display and print content as permitted by the license terms, or terms of use, of the Microsoft product, service or content in which this font was included. You may only (i) embed this font in content as permitted by the embedding restrictions included in this font; and (ii) temporarily download this font to a printer or other output device to help print content. Any other use is prohibited.The following license, based on the MIT license (http://en.wikipedia.org/wiki/MIT_License), applies to the OpenType Layout logic for Biblical Hebrew  Layout Logic  as jointly developed by Ralph Hancock and John Hudson. Permission is hereby granted, free of charge, to any person obtaining a copy of the OpenType Layout logic for Biblical Hebrew and associated documentation files (the  Layout Logic Software ), to deal in the Layout Logic Software without restriction, including without limitation the rights to use, copy, modify, merge, publish, distribute, sublicense, and/or sell copies of the Layout Logic Software, and to permit persons to whom the Layout Logic Software is furnished to do so, subject to the following conditions:The above copyright notice and this permission notice shall be included in all copies or substantial portions of the Layout Logic Software.THE SOFTWARE IS PROVIDED 'AS IS', WITHOUT WARRANTY OF ANY KIND, EXPRESS OR IMPLIED, INCLUDING BUT NOT LIMITED TO THE WARRANTIES OF MERCHANTABILITY, FITNESS FOR A PARTICULAR PURPOSE AND NONINFRINGEMENT. IN NO EVENT SHALL THE AUTHORS OR COPYRIGHT HOLDERS BE LIABLE FOR ANY CLAIM, DAMAGES OR OTHER LIABILITY, WHETHER IN AN ACTION OF CONTRACT, TORT OR OTHERWISE, ARISING FROM, OUT OF OR IN CONNECTION WITH THE SOFTWARE OR THE USE OR OTHER DEALINGS IN THE SOFTWARE. 2016 The Monotype Corporation. All Rights Reserved. Times New RomanRegularMonotype:Times New Roman Regular (Microsoft)Version 6.96TimesNewRomanPSMTTimes New Roman is a trademark of The Monotype Corporation.Monotype Type Drawing Office - Stanley Morison, Victor Lardent 1932Microsoft supplied font. You may use this font to create, display and print content as permitted by the license terms, or terms of use, of the Microsoft product, service or content in which this font was included. You may only (i) embed this font in content as permitted by the embedding restrictions included in this font; and (ii) temporarily download this font to a printer or other output device to help print content. Any other use is prohibited.The following license, based on the MIT license (http://en.wikipedia.org/wiki/MIT_License), applies to the OpenType Layout logic for Biblical Hebrew 襆ayout Logic as jointly developed by Ralph Hancock and John Hudson. Permission is hereby granted, free of charge, to any person obtaining a copy of the OpenType Layout logic for Biblical Hebrew and associated documentation files (the 襆ayout Logic Software?, to deal in the Layout Logic Software without restriction, including without limitation the rights to use, copy, modify, merge, publish, distribute, sublicense, and/or sell copies of the Layout Logic Software, and to permit persons to whom the Layout Logic Software is furnished to do so, subject to the following conditions:The above copyright notice and this permission notice shall be included in all copies or substantial portions of the Layout Logic Software.THE SOFTWARE IS PROVIDED 'AS IS', WITHOUT WARRANTY OF ANY KIND, EXPRESS OR IMPLIED, INCLUDING BUT NOT LIMITED TO THE WARRANTIES OF MERCHANTABILITY, FITNESS FOR A PARTICULAR PURPOSE AND NONINFRINGEMENT. IN NO EVENT SHALL THE AUTHORS OR COPYRIGHT HOLDERS BE LIABLE FOR ANY CLAIM, DAMAGES OR OTHER LIABILITY, WHETHER IN AN ACTION OF CONTRACT, TORT OR OTHERWISE, ARISING FROM, OUT OF OR IN CONNECTION WITH THE SOFTWARE OR THE USE OR OTHER DEALINGS IN THE SOFTWARE.Normaloby
ejnnormalStandardMicrosoft supplied font. You may use this font to create, display and print content as permitted by the license terms, or terms of use, of the Microsoft product, service or content in which this font was included. You may only (i) embed this font in content as permitted by the embedding restrictions included in this font; and (ii) temporarily download this font to a printer or other output device to help print content. Any other use is prohibited.

The following license, based on the MIT license (http://en.wikipedia.org/wiki/MIT_License), applies to the OpenType Layout logic for Biblical Hebrew  Layout Logic  as jointly developed by Ralph Hancock and John Hudson. 

Permission is hereby granted, free of charge, to any person obtaining a copy of the OpenType Layout logic for Biblical Hebrew and associated documentation files (the  Layout Logic Software ), to deal in the Layout Logic Software without restriction, including without limitation the rights to use, copy, modify, merge, publish, distribute, sublicense, and/or sell copies of the Layout Logic Software, and to permit persons to whom the Layout Logic Software is furnished to do so, subject to the following conditions:

The above copyright notice and this permission notice shall be included in all copies or substantial portions of the Layout Logic Software.

THE SOFTWARE IS PROVIDED 'AS IS', WITHOUT WARRANTY OF ANY KIND, EXPRESS OR IMPLIED, INCLUDING BUT NOT LIMITED TO THE WARRANTIES OF MERCHANTABILITY, FITNESS FOR A PARTICULAR PURPOSE AND NONINFRINGEMENT. IN NO EVENT SHALL THE AUTHORS OR COPYRIGHT HOLDERS BE LIABLE FOR ANY CLAIM, DAMAGES OR OTHER LIABILITY, WHETHER IN AN ACTION OF CONTRACT, TORT OR OTHERWISE, ARISING FROM, OUT OF OR IN CONNECTION WITH THE SOFTWARE OR THE USE OR OTHER DEALINGS IN THE SOFTWARE.
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	l$ 2016 Microsoft Corporation. All Rights Reserved.Hebrew OpenType Layout logic copyright  2003 & 2007, Ralph Hancock & John Hudson. This layout logic for Biblical Hebrew is open source software under the MIT License; see embedded license description for details.CalibriRegularMicrosoft: CalibriVersion 6.18Calibri is a trademark of the Microsoft group of companies.Luc(as) de GrootCalibri is a modern sans serif family with subtle roundings on stems and corners. It features real italics, small caps, and multiple numeral sets. Its proportions allow high impact in tightly set lines of big and small text alike. Calibri's many curves and the new rasteriser team up in bigger sizes to reveal a warm and soft character.http://www.microsoft.com/typography/ctfontshttp://lucasfonts.comMicrosoft supplied font. You may use this font to create, display, and print content as permitted by the license terms or terms of use, of the Microsoft product, service, or content in which this font was included. You may only (i) embed this font in content as permitted by the embedding restrictions included in this font; and (ii) temporarily download this font to a printer or other output device to help print content. Any other use is prohibited.The following license, based on the MIT license (http://en.wikipedia.org/wiki/MIT_License), applies to the OpenType Layout logic for Biblical Hebrew  Layout Logic  as jointly developed by Ralph Hancock and John Hudson. Permission is hereby granted, free of charge, to any person obtaining a copy of the OpenType Layout logic for Biblical Hebrew and associated documentation files (the  Layout Logic Software ), to deal in the Layout Logic Software without restriction, including without limitation the rights to use, copy, modify, merge, publish, distribute, sublicense, and/or sell copies of the Layout Logic Software, and to permit persons to whom the Layout Logic Software is furnished to do so, subject to the following conditions:The above copyright notice and this permission notice shall be included in all copies or substantial portions of the Layout Logic Software.THE SOFTWARE IS PROVIDED 'AS IS', WITHOUT WARRANTY OF ANY KIND, EXPRESS OR IMPLIED, INCLUDING BUT NOT LIMITED TO THE WARRANTIES OF MERCHANTABILITY, FITNESS FOR A PARTICULAR PURPOSE AND NONINFRINGEMENT. IN NO EVENT SHALL THE AUTHORS OR COPYRIGHT HOLDERS BE LIABLE FOR ANY CLAIM, DAMAGES OR OTHER LIABILITY, WHETHER IN AN ACTION OF CONTRACT, TORT OR OTHERWISE, ARISING FROM, OUT OF OR IN CONNECTION WITH THE SOFTWARE OR THE USE OR OTHER DEALINGS IN THE SOFTWARE.http://www.microsoft.com/typography/fonts/default.aspx 2016 Microsoft Corporation. All Rights Reserved.Hebrew OpenType Layout logic copyright  2003 & 2007, Ralph Hancock & John Hudson. This layout logic for Biblical Hebrew is open source soft